402-0318-00L  Semiconductor Materials: Characterization, Processing and Devices

SemesterSpring Semester 2022
LecturersS. Schön, M. Shayegan
Periodicityyearly recurring course
Language of instructionEnglish


402-0318-00 VSemiconductor Materials: Characterization, Processing and Devices2 hrs
Tue11:45-13:30HCI H 2.1 »
S. Schön, M. Shayegan
402-0318-00 USemiconductor Materials: Characterization, Processing and Devices1 hrs
Tue13:45-14:30HCI H 2.1 »
S. Schön, M. Shayegan

Catalogue data

AbstractThis course gives an introduction into the fundamentals of semiconductor materials. The main focus in this semester is on state-of-the-art characterization, semiconductor processing and devices.
ObjectiveBasic knowledge of semiconductor physics and technology. Application of this knowledge for state-of-the-art semiconductor device processing
Content1. Material characterization: structural and chemical methods
1.1 X-ray diffraction methods (Powder diffraction, HRXRD, XRR, RSM)
1.2 Electron microscopy Methods (SEM, EDX, TEM, STEM, EELS)
2. Material characterization: electronic methods
2.1 van der Pauw techniquel2.2 Floating zone method
2.2 Hall effect
2.3 Cyclotron resonance spectroscopy
2.4. Quantum Hall effect
3. Material characterization: Optical methods
3.1 Absorption methods
3.2 Photoluminescence methods
3.3 FTIR, Raman spectroscopy
4. Semiconductor processing: lithography
4.1 Optical lithography methods
4.2 Electron beam lithography
4.3 FIB lithography
4.4 Scanning probe lithography
4.5 Direct growth methods (CEO, Nanowires)
5. Semiconductor processing: structuring of layers and devices
5.1 Wet etching methods
5.2 Dry etching methods (RIE, ICP, ion milling)
5.3 Physical vapor depositon methods (thermal, e-beam, sputtering)
5.4 Chemical vapor Deposition methods (PECVD, LPCVD, ALD)
5.5 Cleanroom basics & tour
6. Semiconductor devices
6.1 Semiconductor lasers
6.2 LED & detectors
6.3 Solar cells
6.4 Transistors (FET, HBT, HEMT)
Lecture notesLink
Prerequisites / NoticeThe "compulsory performance element" of this lecture is a short presentation of a research paper complementing the lecture topics. Several topics and corresponding papers will be offered on the moodle page of this lecture.

Performance assessment

Performance assessment information (valid until the course unit is held again)
Performance assessment as a semester course
ECTS credits6 credits
ExaminersS. Schön, W. Wegscheider
Typesession examination
Language of examinationEnglish
RepetitionThe performance assessment is offered every session. Repetition possible without re-enrolling for the course unit.
Mode of examinationoral 20 minutes
Additional information on mode of examinationEach student is required to give a short presentation on a selected topic during the exercises (compulsory continuous performance assessment). The topics focus on the research in the field covered by the lecture. Topics and preparation material will be provided during the lecture. The student’s presentation will be graded and must be passed on its own (pass/fail). Students who do not pass the assignment are required to de-register from the exam and will otherwise be treated as a no show.
This information can be updated until the beginning of the semester; information on the examination timetable is binding.

Learning materials

Moodle courseMoodle-Kurs / Moodle course
Only public learning materials are listed.


No information on groups available.


There are no additional restrictions for the registration.

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