529-0455-00L  Laser for Micro- and Nanostructuring

SemesterAutumn Semester 2021
LecturersT. Lippert
Periodicityyearly recurring course
Language of instructionEnglish


AbstractIntroduction to the fundamentals of lasers and their applications with an emphasis on micro- and nano-structuring. Several applications which are still in the research state, will be discussed together with industrial applications, such as microlithography and laser welding. Other aspects are the materials that are applied in these applications, e.g. photoresists, and their functioning.
ObjectiveIntroduction to the fundamentals of lasers and their applications with an emphasis on micro- and nano structuring. Several applications which are still in the research state, e.g. non-optical lithographies, will be discussed together with industrial applications, such as microlithography and laser welding. Other aspects are the materials that are applied in these applications, e.g. photoresists, and their functioning.
ContentIntroduction to lasers, Overview of micro- and nanotechnology, microlithography, photoresists: classical types and new developments, laser cutting and welding, laser cleaning, laser ablation, polymer ablation: designed polymers, lasers and surfaces, laser spectroscopy, laser chemical vapor deposition, pulsed laser deposition (PLD), special materials by PLD, alternative structuring methods.
Lecture notesThe script (a copy of the slides) will be handed out during the first lecture.
Literature• D. Bäuerle, Laser Processing and Chemistry, 3rd ed., Springer Verlag 2000.
• D. B. Chrisey, G. K. Hubler, Pulsed Laser Deposition of Thin Films, John Wiley & Sons 1994.
• D. Schuöcker, High Power Lasers in Production Engineering, Imperial College Press 1999.
• E. Beyer, Schweissen mit Laser : Grundlagen, Springer Verlag 1995.
• L. F. Thompson, C. G. Willson, M. J. Bowden, Eds., Introduction to Microlithography, 2nd ed., American Chemical Society 1994.
• J. Mazumder, A. Kar, Theory and Application of Laser Chemical Vapor Deposition, Plenum Press 1995.
• W. Demtroeder, Laser Spectroscopy: Basic Concepts and Intrumentation, 3rd ed., Springer 2003.
• F.K. Kneubühl, M. W. Sigrist, Laser, Teubner Taschenbücher Physik, Stuttgart-Leipzig 1999
• FSRM, CD-ROM: An Introduction to the World of Microsystems, Neuchatel.
• Arbeitskreis Lasertechnik R. Poprawe, CD-ROM: Lasertechnik, Aachen.
• J. Gobrecht, Vorlesungsskript: Grundlagen der Mikro- und Nanotechnik, ETH Zuerich, WS 2001/2002.
CompetenciesCompetencies
Subject-specific CompetenciesConcepts and Theoriesassessed
Techniques and Technologiesassessed
Method-specific CompetenciesAnalytical Competenciesfostered
Decision-makingfostered
Media and Digital Technologiesfostered
Problem-solvingassessed
Project Managementfostered
Social CompetenciesCommunicationfostered
Cooperation and Teamworkfostered
Customer Orientationfostered
Leadership and Responsibilityfostered
Self-presentation and Social Influence fostered
Sensitivity to Diversityfostered
Negotiationfostered
Personal CompetenciesAdaptability and Flexibilityfostered
Creative Thinkingassessed
Critical Thinkingassessed
Integrity and Work Ethicsassessed
Self-awareness and Self-reflection fostered
Self-direction and Self-management fostered