636-0103-00L Microtechnology
| Semester | Autumn Semester 2021 |
| Lecturers | A. Hierlemann |
| Periodicity | yearly recurring course |
| Language of instruction | English |
Courses
| Number | Title | Hours | Lecturers | ||||
|---|---|---|---|---|---|---|---|
| 636-0103-00 G | Microtechnology Attention: Lecture starts on Thursday, September 30 This lecture will take place in classroom in Basel. | 3 hrs |
| A. Hierlemann |
Catalogue data
| Abstract | Students are introduced to the basics of microtechnology, cleanroom, semiconductor and silicon process technologies. They will get to know the fabrication of mostly silicon-based microdevices and -systems and all related microfabrication processes. | |||||||||||||||
| Learning objective | Students are introduced to the basics of microtechnology, cleanroom, semiconductor and silicon process technologies. They will get to know the different fabrication methods for various microdevices and systems. | |||||||||||||||
| Content | Introduction to microtechnology, semiconductors, and micro electro mechanical systems (MEMS) - Fundamentals of semiconductors and band model - Fundamentals of devices: transistor and diode. - Silicon processing and fabrication steps - Silicon crystal structure and manufacturing - Thermal oxidation - Doping via diffusion and ion implantation - Photolithography - Thin film deposition: dielectrics and metals - Wet etching & bulk micromachining - Dry etching & surface micromachining - Microtechnological processing and fabrication sequence - Optional: Packaging | |||||||||||||||
| Lecture notes | Handouts in English | |||||||||||||||
| Literature | - S.M. Sze, "Semiconductor Devices, Physics and Technology", 2nd edition, Wiley, 2002 - R.F. Pierret, "Semiconductor Device Fundamentals", Addison Wesley, 1996 - R. C. Jaeger, "Introduction to Microelectronic Fabrication", Prentice Hall 2002 - S.A. Campbell, "The Science and Engineering of Microelectronic Fabrication", 2nd edition, Oxford University Press, 2001 - W. Menz, J. Mohr, O. Paul, "Microsystem Technology", Wiley-VCH, 2001 - G. T. A. Kovacs, "Micromachined Transducers Sourcebook", McGraw-Hill, 1998 - M. J. Madou, "Fundamentals of Microfabrication", 2nd ed., CRC Press, 2002 | |||||||||||||||
| Prerequisites / Notice | Fundamentals in physics and physicochemistry (orbital models etc.) are required, a repetitorium of fundamental physics and quantum theory at the semester beginning can be offered. The information on the web can be updated until the beginning of the semester. | |||||||||||||||
Competencies |
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Performance assessment
| Performance assessment information (valid until the course unit is held again) | |
Performance assessment as a semester course | |
| ECTS credits | 4 credits |
| Examiners | A. Hierlemann |
| Type | session examination |
| Language of examination | English |
| Repetition | The performance assessment is offered every session. Repetition possible without re-enrolling for the course unit. |
| Mode of examination | oral 20 minutes |
| Additional information on mode of examination | The exam can be held also in German. |
| This information can be updated until the beginning of the semester; information on the examination timetable is binding. | |
Learning materials
| No public learning materials available. | |
| Only public learning materials are listed. |
Groups
| No information on groups available. |
Restrictions
| There are no additional restrictions for the registration. |
Offered in
| Programme | Section | Type | |
|---|---|---|---|
| Biotechnology Master | Biomelecular-Orientated | W | |
| Biotechnology Master | System-Orientated | W | |