327-2140-00L Focused Ion Beam and Applications
| Semester | Spring Semester 2021 |
| Lecturers | P. Zeng, A. G. Bittermann, S. Gerstl, L. Grafulha Morales, J. Reuteler |
| Periodicity | every semester recurring course |
| Language of instruction | English |
| Comment | Number of participants limited to 6. PhD students will be asked for a fee. https://scopem.ethz.ch/education/MTP.html Registration form: (Link) |
| Abstract | The introductory course on Focused Ion Beam (FIB) provides theoretical and hands-on learning for new operators, utilizing lectures, demonstrations and hands-on sessions. |
| Learning objective | - Set-up, align and operate a FIB-SEM successfully and safely. - Accomplish operation tasks and optimize microscope performances. - Perform sample preparation (TEM lamella, APT probe…) using FIB-SEM. - Perform other FIB techniques, such as characterization - At the end of the course, students will know how to set-up FIB-SEM, how to prepare TEM lamella/APT probe and how to utilize FIB techniques. |
| Content | This course provides FIB techniques to students with previous SEM experience. - Overview of FIB theory, instrumentation, operation and applications. - Introduction and discussion on FIB and instrumentation. - Lectures on FIB theory. - Lectures on FIB applications. - Practicals on FIB-SEM set-up, cross-beam alignment. - Practicals on site-specific cross-section and TEM lamellar preparation. - Lecture and demonstration on FIB automation. |
| Literature | - Detailed course manual. - Giannuzzi, Stevie: Introduction to focused ion beams instrumentation, theory, techniques, and practice, Springer, 2005. - Orloff, Utlaut, Swanson: High resolution focused ion beams: FIB and its applications, Kluwer Academic/Plenum Publishers, 2003. |
| Prerequisites / Notice | The students should fulfil one or more of these prerequisites: - Prior attendance to the ScopeM Microscopy Training SEM I: Introduction to SEM (327-2125-00L). - Prior SEM experience. |