327-2140-00L  Focused Ion Beam and Applications

SemesterSpring Semester 2021
LecturersP. Zeng, A. G. Bittermann, S. Gerstl, L. Grafulha Morales, J. Reuteler
Periodicityevery semester recurring course
Language of instructionEnglish
CommentNumber of participants limited to 6. PhD students will be asked for a fee. https://scopem.ethz.ch/education/MTP.html

Registration form: (Link)

AbstractThe introductory course on Focused Ion Beam (FIB) provides theoretical and hands-on learning for new operators, utilizing lectures, demonstrations and hands-on sessions.
Objective- Set-up, align and operate a FIB-SEM successfully and safely.
- Accomplish operation tasks and optimize microscope performances.
- Perform sample preparation (TEM lamella, APT probe…) using FIB-SEM.
- Perform other FIB techniques, such as characterization
- At the end of the course, students will know how to set-up FIB-SEM, how to prepare TEM lamella/APT probe and how to utilize FIB techniques.
ContentThis course provides FIB techniques to students with previous SEM experience.
- Overview of FIB theory, instrumentation, operation and applications.
- Introduction and discussion on FIB and instrumentation.
- Lectures on FIB theory.
- Lectures on FIB applications.
- Practicals on FIB-SEM set-up, cross-beam alignment.
- Practicals on site-specific cross-section and TEM lamellar preparation.
- Lecture and demonstration on FIB automation.
Literature- Detailed course manual.
- Giannuzzi, Stevie: Introduction to focused ion beams instrumentation, theory, techniques, and practice, Springer, 2005.
- Orloff, Utlaut, Swanson: High resolution focused ion beams: FIB and its applications, Kluwer Academic/Plenum Publishers, 2003.
Prerequisites / NoticeThe students should fulfil one or more of these prerequisites:
- Prior attendance to the ScopeM Microscopy Training SEM I: Introduction to SEM (327-2125-00L).
- Prior SEM experience.