151-0620-00L  Embedded MEMS Lab

SemesterFrühjahrssemester 2020
DozierendeC. Hierold, S. Blunier, M. Haluska
Periodizitätjedes Semester wiederkehrende Veranstaltung
LehrspracheEnglisch
KommentarNumber of participants limited to 20.



Lehrveranstaltungen

NummerTitelUmfangDozierende
151-0620-00 PEmbedded MEMS Lab
- First part of the compulsory introductory lecture: Wednesday 19.02.2020
- Second part of the compulsory introductory lecture: Wednesday 26.02.2020 (location: tbd)
- Practical portion of the course in the cleanrooms of CLA: 7 consecutive Wednesdays from 13:00 (exact) to ~18:30 during the Semester. Starting days for groups are staggered.
- Attendance is required at all meetings of the course.
45s Std.
Mi13:15-14:00CAB G 57 »
13:15-14:00CHN G 22 »
13:15-14:00CLA G 2 »
13:15-14:00HG D 5.1 »
19.02.13:15-18:00HG F 26.1 »
26.02.13:15-18:00HG F 26.1 »
C. Hierold, S. Blunier, M. Haluska

Katalogdaten

KurzbeschreibungPractical course: Students are introduced to the process steps required for the fabrication of MEMS (Micro Electro Mechanical System) and carry out the fabrication and testing steps in the clean rooms themselves. Additionally, they learn the requirements for working in clean rooms. Processing and characterization will be documented and analyzed in a final report.
LernzielStudents learn the individual process steps that are required to make a MEMS (Micro Electro Mechanical System). Students carry out the process steps themselves in laboratories and clean rooms. Furthermore, participants become familiar with the special requirements (cleanliness, safety, operation of equipment and handling hazardous chemicals) of working in the clean rooms and laboratories. The entire production, processing, and characterization of the MEMS is documented and evaluated in a final report.
InhaltWith guidance from a tutor, the individual silicon microsystem process steps that are required for the fabrication of an accelerometer are carried out:
- Photolithography, dry etching, wet etching, sacrificial layer etching, various cleaning procedures
- Packaging and electrical connection of a MEMS device
- Testing and characterization of the MEMS device
- Written documentation and evaluation of the entire production, processing and characterization
SkriptA document containing theory, background and practical course content is distributed in the informational meeting.
LiteraturThe document provides sufficient information for the participants to successfully participate in the course.
Voraussetzungen / BesonderesParticipating students are required to attend all scheduled lectures and meetings of the course.

Participating students are required to provide proof that they have personal accident insurance prior to the start of the laboratory portion of the course.

This master's level course is limited to 20 students per semester for safety and efficiency reasons.
If there are more than 20 students registered, we regret to restrict access to this course by the following rules:

Priority 1: master students of the master's program in "Micro and Nanosystems"

Priority 2: master students of the master's program in "Mechanical Engineering" with a specialization in Microsystems and Nanoscale Engineering (MAVT-tutors Profs Dual, Hierold, Koumoutsakos, Nelson, Norris, Poulikakos, Pratsinis, Stemmer), who attended the bachelor course "151-0621-00L Microsystems Technology" successfully.

Priority 3: master students, who attended the bachelor course "151-0621-00L Microsystems Technology" successfully.

Priority 4: all other students (PhD, bachelor, master) with a background in silicon or microsystems process technology.

If there are more students in one of these priority groups than places available, we will decide with respect to (in following order) best achieved grade from 151-0621-00L Microsystems Technology, registration to this practicum at previous semester, and by drawing lots.
Students will be notified at the first lecture of the course (introductory lecture) as to whether they are able to participate.

The course is offered in autumn and spring semester.

Leistungskontrolle

Information zur Leistungskontrolle (gültig bis die Lerneinheit neu gelesen wird)
Leistungskontrolle als Semesterkurs
ECTS Kreditpunkte5 KP
PrüfendeC. Hierold, S. Blunier, M. Haluska
Formbenotete Semesterleistung
PrüfungsspracheEnglisch
RepetitionRepetition nur nach erneuter Belegung der Lerneinheit möglich.

Lernmaterialien

Keine öffentlichen Lernmaterialien verfügbar.
Es werden nur die öffentlichen Lernmaterialien aufgeführt.

Gruppen

Keine Informationen zu Gruppen vorhanden.

Einschränkungen

Keine zusätzlichen Belegungseinschränkungen vorhanden.

Angeboten in

StudiengangBereichTyp
Elektrotechnik und Informationstechnologie MasterEmpfohlene FächerWInformation
Elektrotechnik und Informationstechnologie MasterVertiefungsfächerWInformation
Maschineningenieurwissenschaften MasterMicro & NanosystemsWInformation
Mikro- und Nanosysteme MasterLaboratory CourseWInformation
Physik MasterAllgemeine WahlfächerWInformation