636-0114-00L  Microsensors and Microsystems

SemesterSpring Semester 2020
LecturersA. Hierlemann
Periodicitytwo-yearly recurring course
Language of instructionEnglish
CommentAttention: This course was offered in previous semesters with the number: 636-0004-00 "Microsensors and Microsystems". Students that already passed course 636-0004-00 cannot receive credits for course 636-0114-00.
Prerequisites: Physics I and Physics II highly recommended. This class builds on the contents of course 636-0103-00L, "Microtechnology", which are assumed to be known


636-0114-00 GMicrosensors and Microsystems3 hrs
Thu13:15-16:00BSA E 46 »
A. Hierlemann

Catalogue data

AbstractStudents are introduced to microsensor and microsystem technology, the different materials and associated micromachining and fabrication techniques. They become acquainted with fundamentals of different transducers and their applications.
ObjectiveStudents are introduced to microsensor and microsystem technology. The students will get to know the different materials (silicon, glass, plastics) and the respective micromachining and fabrication techniques. They will become acquainted with the fundamentals of the different transducers including mechanical, thermal, magnetic, chemical, optical, and biosensors. They also will get to know strategies to integrate components into microsystems.
ContentIntroduction to microensors and microsystems

# Brief introduction to semiconductors
# Silicon and glass micromachining
# Plastic materials and their micromachining
# Fundamentals of different transducers
# Mechanical sensors
# Thermal sensors
# Magnetic sensors
# Optical devices
# Chemical and biosensors
# Microfluidics
Lecture notesHandouts in English
Literature- S.M. Sze, "Semiconductor Devices, Physics and Technology", 2nd edition, Wiley, 2002
- W. Menz, J. Mohr, O. Paul, “Microsystem Technology”, Wiley-VCH, 2001
- G. T. A. Kovacs, “Micromachined Transducers Sourcebook”, McGraw-Hill, 1998
- M. J. Madou, “Fundamentals of Microfabrication", 2nd ed., CRC Press, 2002
- S.A. Campbell, "The Science and Engineering of Microelectronic Fabrication", 2nd edition, Oxford University Press, 2001
Prerequisites / NoticeParts of the course rely on knowledge of the fall semester class "Microtechnology" (636-0103-00L).
Lab URL: Link

Performance assessment

Performance assessment information (valid until the course unit is held again)
Performance assessment as a semester course
ECTS credits4 credits
ExaminersA. Hierlemann
Typesession examination
Language of examinationEnglish
RepetitionThe performance assessment is offered every session. Repetition possible without re-enrolling for the course unit.
Mode of examinationoral 20 minutes
Additional information on mode of examinationThe exam can be hold in English or German. The performance assessment can be examined every session. Repetition possible without re-enrolling for the course unit.
This information can be updated until the beginning of the semester; information on the examination timetable is binding.

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Offered in

Biotechnology MasterBiomelecular-OrientatedWInformation
Biotechnology MasterSystem-OrientatedWInformation