636-0114-00L  Microsensors and Microsystems

SemesterFrühjahrssemester 2019
DozierendeA. Hierlemann
Periodizitätjährlich wiederkehrende Veranstaltung
KommentarAttention: This course was offered in previous semesters with the number: 636-0004-00 "Microsensors and Microsystems". Students that already passed course 636-0004-00 cannot receive credits for course 636-0114-00.
Prerequisites: Physics I and Physics II highly recommended. This class builds on the contents of course 636-0103-00L, "Microtechnology", which are assumed to be known


636-0114-00 GMicrosensors and Microsystems
First lecture (Thursday, Feb. 21) in room Euler, rest of semester room Erasmus.
3 Std.
Do14:15-17:00BSA E 54 »
A. Hierlemann


KurzbeschreibungStudents are introduced to microsensor and microsystem technology, the different materials and associated micromachining and fabrication techniques. They become acquainted with fundamentals of different transducers and their applications.
LernzielStudents are introduced to microsensor and microsystem technology. The students will get to know the different materials (silicon, glass, plastics) and the respective micromachining and fabrication techniques. They will become acquainted with the fundamentals of the different transducers including mechanical, thermal, magnetic, chemical, optical, and biosensors. They also will get to know strategies to integrate components into microsystems.
InhaltIntroduction to microensors and microsystems

# Brief introduction to semiconductors
# Silicon and glass micromachining
# Wafer bonding
# Plastic materials and their micromachining
# Fundamentals of different transducers
# Mechanical sensors
# Thermal sensors
# Magnetic sensors
# Optical devices
# Chemical and biosensors
# Microfluidics
SkriptHandouts in English
Literatur- S.M. Sze, "Semiconductor Devices, Physics and Technology", 2nd edition, Wiley, 2002
- W. Menz, J. Mohr, O. Paul, “Microsystem Technology”, Wiley-VCH, 2001
- G. T. A. Kovacs, “Micromachined Transducers Sourcebook”, McGraw-Hill, 1998
- M. J. Madou, “Fundamentals of Microfabrication", 2nd ed., CRC Press, 2002
- S.A. Campbell, "The Science and Engineering of Microelectronic Fabrication", 2nd edition, Oxford University Press, 2001
Voraussetzungen / BesonderesLab URL: Link


Information zur Leistungskontrolle (gültig bis die Lerneinheit neu gelesen wird)
Leistungskontrolle als Semesterkurs
ECTS Kreditpunkte4 KP
PrüfendeA. Hierlemann
RepetitionDie Leistungskontrolle wird in jeder Session angeboten. Die Repetition ist ohne erneute Belegung der Lerneinheit möglich.
Prüfungsmodusmündlich 20 Minuten
Zusatzinformation zum PrüfungsmodusThe exam can be hold in English or German. The performance assessment can be examined every session. Repetition possible without re-enrolling for the course unit.
Diese Angaben können noch zu Semesterbeginn aktualisiert werden; verbindlich sind die Angaben auf dem Prüfungsplan.


Keine öffentlichen Lernmaterialien verfügbar.
Es werden nur die öffentlichen Lernmaterialien aufgeführt.


Keine Informationen zu Gruppen vorhanden.


Keine zusätzlichen Belegungseinschränkungen vorhanden.

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Biotechnologie MasterBiomolekulare OrientierungWInformation
Biotechnologie MasterSystem-OrientierungWInformation