402-0318-00L  Semiconductor Materials: Characterization, Processing and Devices

SemesterSpring Semester 2018
LecturersS. Schön, W. Wegscheider
Periodicityyearly recurring course
Language of instructionEnglish



Courses

NumberTitleHoursLecturers
402-0318-00 VSemiconductor Materials: Characterization, Processing and Devices2 hrs
Tue11:45-13:30HCP E 47.3 »
S. Schön, W. Wegscheider
402-0318-00 USemiconductor Materials: Characterization, Processing and Devices1 hrs
Tue13:45-14:30HCP E 47.3 »
S. Schön, W. Wegscheider

Catalogue data

AbstractThis course gives an introduction into the fundamentals of semiconductor materials. The main focus in this semester is on state-of-the-art characterization, semiconductor processing and devices.
ObjectiveBasic knowledge of semiconductor physics and technology. Application of this knowledge for state-of-the-art semiconductor device processing
ContentSemiconductor material characterization (ex situ): Structural and chemical methods (XRD, SEM, TEM, EDX, EELS, SIMS), electronic methods (Hall & quantum Hall effect, transport), optical methods (PL, absorption sepctroscopy);
Semiconductor processing: E-beam lithography, optical lithography, structuring of layers and devices (RIE, ICP), thin film deposition (metallization, PECVD, sputtering, ALD);
Semiconductor devices: Bipolar and field effect transistors, semiconductor lasers, other devices
Lecture notesLink

Performance assessment

Performance assessment information (valid until the course unit is held again)
Performance assessment as a semester course
ECTS credits6 credits
ExaminersW. Wegscheider, S. Schön
Typesession examination
Language of examinationEnglish
RepetitionThe performance assessment is offered every session. Repetition possible without re-enrolling for the course unit.
Mode of examinationoral 20 minutes
Additional information on mode of examinationStudents are required to give a short presentation each on a selected topic during the exercises. The topics focus on the research in the field covered by the lecture. Topics and preparation material will be provided during the lecture.
This information can be updated until the beginning of the semester; information on the examination timetable is binding.

Learning materials

 
Moodle courseMoodle-Kurs / Moodle course
Only public learning materials are listed.

Groups

No information on groups available.

Restrictions

There are no additional restrictions for the registration.

Offered in

ProgrammeSectionType
Doctoral Department of PhysicsDoctoral and Post-Doctoral CoursesWInformation
Physics MasterSelection: Solid State PhysicsWInformation