151-0172-00L  Microsystems II: Devices and Applications

SemesterSpring Semester 2018
LecturersC. Hierold, C. I. Roman
Periodicityyearly recurring course
Language of instructionEnglish



Courses

NumberTitleHoursLecturers
151-0172-00 VMicrosystems II: Devices and Applications3 hrs
Thu13:15-16:00HG D 1.2 »
C. Hierold, C. I. Roman
151-0172-00 UMicrosystems II: Devices and Applications
The course starts in the second week of the semester.
3 hrs
Mon13:15-16:00ML F 39 »
C. I. Roman

Catalogue data

AbstractThe students are introduced to the fundamentals and physics of microelectronic devices as well as to microsystems in general (MEMS). They will be able to apply this knowledge for system research and development and to assess and apply principles, concepts and methods from a broad range of technical and scientific disciplines for innovative products.
ObjectiveThe students are introduced to the fundamentals and physics of microelectronic devices as well as to microsystems in general (MEMS), basic electronic circuits for sensors, RF-MEMS, chemical microsystems, BioMEMS and microfluidics, magnetic sensors and optical devices, and in particular to the concepts of Nanosystems (focus on carbon nanotubes), based on the respective state-of-research in the field. They will be able to apply this knowledge for system research and development and to assess and apply principles, concepts and methods from a broad range of technical and scientific disciplines for innovative products.

During the weekly 3 hour module on Mondays dedicated to Übungen the students will learn the basics of Comsol Multiphysics and utilize this software to simulate MEMS devices to understand their operation more deeply and optimize their designs.
ContentTransducer fundamentals and test structures
Pressure sensors and accelerometers
Resonators and gyroscopes
RF MEMS
Acoustic transducers and energy harvesters
Thermal transducers and energy harvesters
Optical and magnetic transducers
Chemical sensors and biosensors, microfluidics and bioMEMS
Nanosystem concepts
Basic electronic circuits for sensors and microsystems
Lecture notesHandouts (on-line)

Performance assessment

Performance assessment information (valid until the course unit is held again)
Performance assessment as a semester course
ECTS credits6 credits
ExaminersC. Hierold, C. I. Roman
Typesession examination
Language of examinationEnglish
RepetitionThe performance assessment is offered every session. Repetition possible without re-enrolling for the course unit.
Mode of examinationoral 20 minutes
Additional information on mode of examinationStudents registered for the Devices and Systems (D&S) course can participate voluntarily in a midterm exam, which may improve the final grade of the D&S oral exam. This midterm 1 hour exam is written and graded and will contain assignments/problems from the selected parts of D&S lectures and tutorials presented until the day of the examination. Obtaining 90-100% of points at the midterm exam will improve the student¿s final grade by max. 0.5 grades, while obtaining 75-90% of points will improve the student¿s final grade by max. 0.25 grades. The maximum grade (6.0) can also be achieved exclusively by the oral exam performance itself independent of the bonus from the midterm exam. The date and time of the midterm exam will be announced by the lecturer. No auxiliary means are allowed. Any behavior during the exam which violates the ETH ethical code will result in both the loss of bonus points but also the application of standard disciplinary measures.
This information can be updated until the beginning of the semester; information on the examination timetable is binding.

Learning materials

 
Main linkInformation
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Groups

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Restrictions

There are no additional restrictions for the registration.

Offered in

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