636-0103-00L Microtechnology

Semester	Herbstsemester 2017
Dozierende	A. Hierlemann
Periodizität	jährlich wiederkehrende Veranstaltung
Lehrsprache	Englisch
Kommentar	Attention: This course was offered in previous semesters with the number: 636-0020-00 "Microtechnology and Microelectronics". Students that already passed course 636-0020-00 cannot receive credits for course 636-0103-00.

Kurzbeschreibung	Students are introduced to the basics of microtechnology, cleanroom, semiconductor and silicon process technologies. They will get to know the fabrication of mostly silicon-based microdevices and -systems and all related microfabrication processes.
Lernziel	Students are introduced to the basics of microtechnology, cleanroom, semiconductor and silicon process technologies. They will get to know the different fabrication methods for various microdevices and systems.
Inhalt	Introduction to microtechnology, semiconductors, and micro electro mechanical systems (MEMS) - Fundamentals of semiconductors and band model - Fundamentals of devices: transistor and diode. - Silicon processing and fabrication steps - Silicon crystal structure and manufacturing - Thermal oxidation - Doping via diffusion and ion implantation - Photolithography - Thin film deposition: dielectrics and metals - Wet etching & bulk micromachining - Dry etching & surface micromachining - Microtechnological processing and fabrication sequence - Optional: Packaging
Skript	Handouts in English
Literatur	- S.M. Sze, "Semiconductor Devices, Physics and Technology", 2nd edition, Wiley, 2002 - R.F. Pierret, "Semiconductor Device Fundamentals", Addison Wesley, 1996 - R. C. Jaeger, "Introduction to Microelectronic Fabrication", Prentice Hall 2002 - S.A. Campbell, "The Science and Engineering of Microelectronic Fabrication", 2nd edition, Oxford University Press, 2001 - W. Menz, J. Mohr, O. Paul, "Microsystem Technology", Wiley-VCH, 2001 - G. T. A. Kovacs, "Micromachined Transducers Sourcebook", McGraw-Hill, 1998 - M. J. Madou, "Fundamentals of Microfabrication", 2nd ed., CRC Press, 2002
Voraussetzungen / Besonderes	Fundamentals in physics and physicochemistry (orbital models etc.) are required, a repetitorium of fundamental physics and quantum theory at the semester beginning can be offered. The information on the web can be updated until the beginning of the semester.