151-0621-00L  Microsystems I: Process Technology and Integration

SemesterAutumn Semester 2017
LecturersM. Haluska, C. Hierold
Periodicityyearly recurring course
Language of instructionEnglish



Courses

NumberTitleHoursLecturers
151-0621-00 VMicrosystems I: Process Technology and Integration
The course starts in the second week of the semester.
3 hrs
Thu13:15-16:00HG E 5 »
C. Hierold, M. Haluska
151-0621-00 UMicrosystems I: Process Technology and Integration
The course starts in the 3rd week of the Semester.
3 hrs
Tue15:15-18:00NO C 60 »
M. Haluska

Catalogue data

AbstractStudents are introduced to the fundamentals of semiconductors, the basics of micromachining and silicon process technology and will learn about the fabrication of microsystems and -devices by a sequence of defined processing steps (process flow).
ObjectiveStudents are introduced to the basics of micromachining and silicon process technology and will understand the fabrication of microsystem devices by the combination of unit process steps ( = process flow).
Content- Introduction to microsystems technology (MST) and micro electro mechanical systems (MEMS)
- Basic silicon technologies: Thermal oxidation, photolithography and etching, diffusion and ion implantation, thin film deposition.
- Specific microsystems technologies: Bulk and surface micromachining, dry and wet etching, isotropic and anisotropic etching, beam and membrane formation, wafer bonding, thin film mechanical properties.
Application of selected technologies will be demonstrated on case studies.
Lecture notesHandouts (available online)
Literature- S.M. Sze: Semiconductor Devices, Physics and Technology
- W. Menz, J. Mohr, O.Paul: Microsystem Technology
- Hong Xiao: Introduction to Semiconductor Manufacturing Technology
- M. J. Madou: Fundamentals of Microfabrication and Nanotechnology, 3rd ed.
- T. M. Adams, R. A. Layton: Introductory MEMS, Fabrication and Applications
Prerequisites / NoticePrerequisites: Physics I and II

Performance assessment

Performance assessment information (valid until the course unit is held again)
Performance assessment as a semester course
ECTS credits6 credits
ExaminersC. Hierold, M. Haluska
Typesession examination
Language of examinationEnglish
RepetitionThe performance assessment is offered every session. Repetition possible without re-enrolling for the course unit.
Mode of examinationoral 20 minutes
Additional information on mode of examinationStudents registered for Microsystems I course can voluntary participate in a midterm exam which would count as a bonus to the final grade of the MST oral exam. This midterm exam is written and graded and will contain assignments/problems from the selected parts of MST lectures and tutorials presented until the day of the examination. Obtaining 90 - 100% of points at the midterm exam improves the student's grade at the final oral exam by max. 0.5 grades, while obtaining 75-90% of points improves the final oral exam grade by max. 0.25 grades. The maximum grade (6.0) can also be achieved exclusively by the oral exam performance itself without resorting to the bonus from the midterm exam. The midterm exam will take 1 hour. The date and time of the midterm exam will be noticed to students by the lecturer. No auxiliary means are allowed. Any behavior during the exam which violates the ETH ethical codex will result in both the loss of bonus points but also the application of standard disciplinary measures.
This information can be updated until the beginning of the semester; information on the examination timetable is binding.

Learning materials

 
Main linkInformation
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Offered in

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Mechanical Engineering BachelorBiomedical EngineeringWInformation
Mechanical Engineering MasterMicro & NanosystemsWInformation
Micro- and Nanosystems MasterElective Core CoursesWInformation
Physics MasterGeneral ElectivesWInformation