151-0620-00L  Embedded MEMS Lab

SemesterAutumn Semester 2017
LecturersC. Hierold, S. Blunier, M. Haluska
Periodicityevery semester recurring course
Language of instructionEnglish


151-0620-00 PEmbedded MEMS Lab
- Distribution of the script / class material and first part of the introduction lecture (compulsory): 25.09.2017, 13:15-18h
- Second part of the introduction lecture (compulsory): 02.10.2017, 13:15 - 18h
- Practical portion of the course: 7 consecutive Mondays from 13:00 to 18:30 during the semester weeks. Starting days for groups are staggered.
- Attendance is required at all meetings of the course.
45s hrs
Mon13:15-14:00ML J 34.1 »
13:15-14:00ML J 34.3 »
13:15-14:00ML J 37.1 »
13:15-19:00CLA G 2 »
25.09.13:15-18:00LEE E 308 »
02.10.13:15-18:00LEE E 308 »
C. Hierold, S. Blunier, M. Haluska

Catalogue data

AbstractPractical course: Students are introduced to the process steps required for the fabrication of MEMS (Micro Electro Mechanical System) and carry out the fabrication and testing steps in the clean rooms by themselves. Additionally, they learn the requirements for working in clean rooms. Processing and characterization will be documented and analyzed in a final report. Limited access
ObjectiveStudents learn the individual process steps that are required to make a MEMS (Micro Electro Mechanical System). Students carry out the process steps themselves in laboratories and clean rooms. Furthermore, participants become familiar with the special requirements (cleanliness, safety, operation of equipment and handling hazardous chemicals) of working in the clean rooms and laboratories. The entire production, processing, and characterization of the MEMS is documented and evaluated in a final report.
ContentWith guidance from a tutor, the individual silicon microsystem process steps that are required for the fabrication of an accelerometer are carried out:
- Photolithography, dry etching, wet etching, sacrificial layer etching, various cleaning procedures
- Packaging and electrical connection of a MEMS device
- Testing and characterization of the MEMS device
- Written documentation and evaluation of the entire production, processing and characterization
Lecture notesA document containing theory, background and practical course content is distributed at the first meeting of the course.
LiteratureThe document provides sufficient information for the participants to successfully participate in the course.
Prerequisites / NoticeParticipating students are required to attend all scheduled lectures and meetings of the course.

Participating students are required to provide proof that they have personal accident insurance prior to the start of the laboratory portion of the course.

This master's level course is limited to 15 students per semester for safety and efficiency reasons.
If there are more than 15 students registered, we regret to restrict access to this course by the following rules:

Priority 1: master students of the master's program in "Micro and Nanosystems"

Priority 2: master students of the master's program in "Mechanical Engineering" with a specialization in Microsystems and Nanoscale Engineering (MAVT-tutors Profs Daraio, Dual, Hierold, Koumoutsakos, Nelson, Norris, Park, Poulikakos, Pratsinis, Stemmer), who attended the bachelor course "151-0621-00L Microsystems Technology" successfully.

Priority 3: master students, who attended the bachelor course "151-0621-00L Microsystems Technology" successfully.

Priority 4: all other students (PhD, bachelor, master) with a background in silicon or microsystems process technology.

If there are more students in one of these priority groups than places available, we will decide by (in following order) best achieved grade from 151-0621-00L Microsystems Technology, registration to this practicum at previous semester, and by drawing lots.
Students will be notified at the first lecture of the course (introductory lecture) as to whether they are able to participate.

The course is offered in autumn and spring semester.

Performance assessment

Performance assessment information (valid until the course unit is held again)
Performance assessment as a semester course
ECTS credits5 credits
ExaminersC. Hierold, S. Blunier, M. Haluska
Typegraded semester performance
Language of examinationEnglish
RepetitionRepetition only possible after re-enrolling for the course unit.
Additional information on mode of examinationParticipation in both introductory lectures and all lab modules is mandatory.

Learning materials

Main linkInformation
Only public learning materials are listed.


No information on groups available.


There are no additional restrictions for the registration.

Offered in

Electrical Engineering and Information Technology MasterRecommended SubjectsWInformation
Mechanical Engineering MasterMicro & NanosystemsWInformation
Micro- and Nanosystems MasterLaboratory CourseW+Information
Physics MasterGeneral ElectivesWInformation