Students are introduced to the basics of micromachining and silicon process technology and will learn about the fabrication of microsystems and -devices by a sequence of defined processing steps (process flow).
Learning objective
Students are introduced to the basics of micromachining and silicon process technology and will understand the fabrication of microsystem devices by the combination of unit process steps ( = process flow).
Content
- Introduction to microsystems technology (MST) and micro electro mechanical systems (MEMS) - Basic silicon technologies: Thermal oxidation, photolithography and etching, diffusion and ion implantation, thin film deposition. - Specific microsystems technologies: Bulk and surface micromachining, dry and wet etching, isotropic and anisotropic etching, beam and membrane formation, wafer bonding, thin film mechanical and thermal properties, piezoelectric and piezoresitive materials. - Selected microsystems: Mechanical sensors and actuators, microresonators, thermal sensors and actuators, system integration and encapsulation.
Lecture notes
Handouts (available online)
Literature
- S.M. Sze: Semiconductor Devices, Physics and Technology - W. Menz, J. Mohr, O.Paul: Microsystem Technology - G. Kovacs: Micromachined Transducer Sourcebook
Prerequisites / Notice
Prerequisites: Physics I and II
Performance assessment
Performance assessment information (valid until the course unit is held again)
The performance assessment is offered every session. Repetition possible without re-enrolling for the course unit.
Mode of examination
oral 20 minutes
Additional information on mode of examination
Students registered for Microsystem Technology (MST) course can voluntary participate in a midterm exam which would count as a bonus to the final grade of the MST oral exam. This midterm exam is written and graded and will contain assignments/problems from the selected parts of MST lectures and tutorials presented until the day of the examination. Obtaining 80-100% of points at the midterm exam improves the student¿s grade at the final oral exam by max. 0.5 grades, while obtaining 60-80% of points improves the final oral exam grade by max. 0.25 grades. The maximum grade (6.0) can also be achieved exclusively by the oral exam performance itself without resorting to the bonus from the midterm exam. The midterm exam will take 1 hour. The date and time of the midterm exam will be noticed to students by the lecturer. No auxiliary means are allowed. Any behavior during the exam which violates the ETH ethical codex will result in both the loss of bonus points but also the application of standard disciplinary measures.
This information can be updated until the beginning of the semester; information on the examination timetable is binding.
Performance assessment as a semester course