636-0114-00L  Microsensors and Microsystems

SemesterSpring Semester 2021
LecturersA. Hierlemann
Periodicitytwo-yearly recurring course
CourseDoes not take place this semester.
Language of instructionEnglish
CommentAttention: This course was offered in previous semesters with the number: 636-0004-00 "Microsensors and Microsystems". Students that already passed course 636-0004-00 cannot receive credits for course 636-0114-00.
Prerequisites: Physics I and Physics II highly recommended. This class builds on the contents of course 636-0103-00L, "Microtechnology", which are assumed to be known


AbstractStudents are introduced to microsensor and microsystem technology, the different materials and associated micromachining and fabrication techniques. They become acquainted with fundamentals of different transducers and their applications.
ObjectiveStudents are introduced to microsensor and microsystem technology. The students will get to know the different materials (silicon, glass, plastics) and the respective micromachining and fabrication techniques. They will become acquainted with the fundamentals of the different transducers including mechanical, thermal, magnetic, chemical, optical, and biosensors. They also will get to know strategies to integrate components into microsystems.
ContentIntroduction to microensors and microsystems

# Brief introduction to semiconductors
# Silicon and glass micromachining
# Plastic materials and their micromachining
# Fundamentals of different transducers
# Mechanical sensors
# Thermal sensors
# Magnetic sensors
# Optical devices
# Chemical and biosensors
# Microfluidics
# BioMEMS
Lecture notesHandouts in English
Literature- S.M. Sze, "Semiconductor Devices, Physics and Technology", 2nd edition, Wiley, 2002
- W. Menz, J. Mohr, O. Paul, “Microsystem Technology”, Wiley-VCH, 2001
- G. T. A. Kovacs, “Micromachined Transducers Sourcebook”, McGraw-Hill, 1998
- M. J. Madou, “Fundamentals of Microfabrication", 2nd ed., CRC Press, 2002
- S.A. Campbell, "The Science and Engineering of Microelectronic Fabrication", 2nd edition, Oxford University Press, 2001
Prerequisites / NoticeParts of the course rely on knowledge of the fall semester class "Microtechnology" (636-0103-00L).
Lab URL: Link