Silke Schön: Catalogue data in Spring Semester 2012

Name PD Dr. Silke Schön
Name variantsSilke Schön
S Schoen
S Schon
S Schön
FieldExperimental Physics
ETH Zürich, HCI D 121
Vladimir-Prelog-Weg 1-5/10
8093 Zürich
Telephone+41 44 633 21 39

402-0318-00LSemiconductor Materials: Characterization, Processing and Devices Information 6 credits2V + 1US. Schön, W. Wegscheider
AbstractThis course gives an introduction into the fundamentals of semiconductor materials. The main focus of the second part is on state-of-the-art characterization, semiconductor processing and devices.
ObjectiveBasic knowledge of semiconductor physics and technology. Application of this knowledge for state-of-the-art semiconductor device processing
ContentSemiconductor material characterization (ex situ): Structural and chemical methods (XRD, SEM, TEM, EDX, EELS, SIMS), electronic methods (Hall & quantum Hall effect, transport), optical methods (PL, absorption sepctroscopy);
Semiconductor processing: E-beam lithography, optical lithography, structuring of layers and devices (RIE, ICP), thin film deposition (metallization, PECVD, sputtering, ALD);
Semiconductor devices: Bipolar and field effect transistors, semiconductor lasers, other devices