Silke Schön: Katalogdaten im Frühjahrssemester 2017 |
| Name | Frau PD Dr. Silke Schön |
| Namensvarianten | Silke Schön S Schoen S Schon S Schön |
| Lehrgebiet | Experimentalphysik |
| Adresse | FIRST-Lab ETH Zürich, HCI D 121 Vladimir-Prelog-Weg 1-5/10 8093 Zürich SWITZERLAND |
| Telefon | +41 44 633 21 39 |
| schoen@first.ethz.ch | |
| Departement | Physik |
| Beziehung | Privatdozentin |
| Nummer | Titel | ECTS | Umfang | Dozierende | |
|---|---|---|---|---|---|
| 402-0318-00L | Semiconductor Materials: Characterization, Processing and Devices | 6 KP | 2V + 1U | S. Schön, W. Wegscheider | |
| Kurzbeschreibung | This course gives an introduction into the fundamentals of semiconductor materials. The main focus in this semester is on state-of-the-art characterization, semiconductor processing and devices. | ||||
| Lernziel | Basic knowledge of semiconductor physics and technology. Application of this knowledge for state-of-the-art semiconductor device processing | ||||
| Inhalt | Semiconductor material characterization (ex situ): Structural and chemical methods (XRD, SEM, TEM, EDX, EELS, SIMS), electronic methods (Hall & quantum Hall effect, transport), optical methods (PL, absorption sepctroscopy); Semiconductor processing: E-beam lithography, optical lithography, structuring of layers and devices (RIE, ICP), thin film deposition (metallization, PECVD, sputtering, ALD); Semiconductor devices: Bipolar and field effect transistors, semiconductor lasers, other devices | ||||
| Skript | https://moodle-app2.let.ethz.ch/course/view.php?id=2996 | ||||