Cosmin Ioan Roman: Catalogue data in Spring Semester 2023

Name Dr. Cosmin Ioan Roman
E-mailcosmin.roman@micro.mavt.ethz.ch
DepartmentMechanical and Process Engineering
RelationshipLecturer

NumberTitleECTSHoursLecturers
151-0172-00LMicrosystems II: Devices and Applications Information 6 credits3V + 3UC. Hierold, C. I. Roman
AbstractThe students are introduced to the fundamentals and physics of microelectronic devices as well as to microsystems in general (MEMS). They will be able to apply this knowledge for system research and development and to assess and apply principles, concepts and methods from a broad range of technical and scientific disciplines for innovative products.
ObjectiveThe students are introduced to the fundamentals and physics of microelectronic devices as well as to microsystems in general (MEMS), basic electronic circuits for sensors, RF-MEMS, chemical microsystems, BioMEMS and microfluidics, magnetic sensors and optical devices, and in particular to the concepts of Nanosystems (focus on carbon nanotubes), based on the respective state-of-research in the field. They will be able to apply this knowledge for system research and development and to assess and apply principles, concepts and methods from a broad range of technical and scientific disciplines for innovative products.

During the weekly 3 hour module on Mondays dedicated to Übungen the students will learn the basics of Comsol Multiphysics and utilize this software to simulate MEMS devices to understand their operation more deeply and optimize their designs.
ContentTransducer fundamentals and test structures
Pressure sensors and accelerometers
Resonators and gyroscopes
RF MEMS
Acoustic transducers and energy harvesters
Thermal transducers and energy harvesters
Optical and magnetic transducers
Chemical sensors and biosensors, microfluidics and bioMEMS
Nanosystem concepts
Basic electronic circuits for sensors and microsystems
Lecture notesHandouts (on-line)