Silke Schön: Katalogdaten im Frühjahrssemester 2012

NameFrau PD Dr. Silke Schön
NamensvariantenSilke Schön
S Schoen
S Schon
S Schön
LehrgebietExperimentalphysik
Adresse
FIRST-Lab
ETH Zürich, HCI D 121
Vladimir-Prelog-Weg 1-5/10
8093 Zürich
SWITZERLAND
Telefon+41 44 633 21 39
E-Mailschoen@first.ethz.ch
DepartementPhysik
BeziehungPrivatdozentin

NummerTitelECTSUmfangDozierende
402-0318-00LSemiconductor Materials: Characterization, Processing and Devices Information 6 KP2V + 1US. Schön, W. Wegscheider
KurzbeschreibungThis course gives an introduction into the fundamentals of semiconductor materials. The main focus of the second part is on state-of-the-art characterization, semiconductor processing and devices.
LernzielBasic knowledge of semiconductor physics and technology. Application of this knowledge for state-of-the-art semiconductor device processing
InhaltSemiconductor material characterization (ex situ): Structural and chemical methods (XRD, SEM, TEM, EDX, EELS, SIMS), electronic methods (Hall & quantum Hall effect, transport), optical methods (PL, absorption sepctroscopy);
Semiconductor processing: E-beam lithography, optical lithography, structuring of layers and devices (RIE, ICP), thin film deposition (metallization, PECVD, sputtering, ALD);
Semiconductor devices: Bipolar and field effect transistors, semiconductor lasers, other devices