Miroslav Haluska: Courses in Spring Semester 2021

Name Dr. Miroslav Haluska
Chair in Micro and Nanosystems
ETH Zürich, CLA G 3
Tannenstrasse 3
8092 Zürich
Telephone+41 44 632 76 40
DepartmentMechanical and Process Engineering

151-0620-00LEmbedded MEMS Lab
Number of participants limited to 20.
5 credits3P
151-0620-00 PEmbedded MEMS Lab
- First part of the compulsory introductory lecture: Wed 24.02.2021 from 13h to 18h (venue: tbd)
- Second part of the compulsory introductory lecture: Wed 03.03.2021 from 13h to 18h (venue: tbd)
Practical portion of the course in the cleanrooms of FIRST-CLA consecutive Wednesdays from 13:00 (exact) to ~18:30 during the Semester. Starting days for groups are staggered.
- Attendance is required at all meetings of the course.
45s hrs
Wed13:15-14:00CAB G 57 »
13:15-14:00CHN G 22 »
13:15-14:00CLA G 2 »
13:15-14:00HG D 5.1 »
C. Hierold, M. Haluska