Andreas Hierlemann: Katalogdaten im Herbstsemester 2016 |  |
| Name | Herr Prof. Dr. Andreas Hierlemann |
| Namensvarianten | A Hierlemann |
| Lehrgebiet | Biosystems Eingineering |
| Adresse | Dep. Biosysteme ETH Zürich, BSS G 53.1 Klingelbergstrasse 48 4056 Basel SWITZERLAND |
| Telefon | +41 61 387 31 50 |
| Fax | +41 61 387 39 92 |
| andreas.hierlemann@bsse.ethz.ch | |
| URL | https://bsse.ethz.ch/bel |
| Departement | Biosysteme |
| Beziehung | Ordentlicher Professor |
| Nummer | Titel | ECTS | Umfang | Dozierende | |
|---|---|---|---|---|---|
| 636-0020-00L | Microtechnology and Microelectronics Prerequisites: Physics I and Physics II highly recommended. | 6 KP | 3G | A. Hierlemann | |
| Kurzbeschreibung | Students are introduced to the basics of semiconductors, microelectronics, microtechnology, and silicon process technology. They will get to know the fabrication of silicon-based microdevices and -systems by a sequence of defined batch processing steps as well as dedicated microfabrication processes. | ||||
| Lernziel | Students are introduced to the basics of semiconductors, microelectronics, microtechnology, and silicon process technology. They will get to know the different fabrication methods for various microdevices and systems. | ||||
| Inhalt | Introduction to semiconductors, microelectronics, microtechnology, and micro electro mechanical systems (MEMS) • Fundamentals of semiconductors • Basics of microelectronics: transistor and diode. • Silicon processing and fabrication steps • Silicon crystal structure and manufacturing • Thermal oxidation • Doping via diffusion and ion implantation • Photolithography • Thin film deposition: dielectrics and metals • Wet etching & bulk micromachining • Dry etching & surface micromachining • Microelectronics processing and fabrication sequence • Packaging | ||||
| Skript | Handouts in English | ||||
| Literatur | - S.M. Sze, "Semiconductor Devices, Physics and Technology", 2nd edition, Wiley, 2002 - R.F. Pierret, "Semiconductor Device Fundamentals", Addison Wesley, 1996 - R. C. Jaeger, "Introduction to Microelectronic Fabrication", Prentice Hall 2002 - S.A. Campbell, "The Science and Engineering of Microelectronic Fabrication", 2nd edition, Oxford University Press, 2001 - W. Menz, J. Mohr, O. Paul, “Microsystem Technology”, Wiley-VCH, 2001 - G. T. A. Kovacs, “Micromachined Transducers Sourcebook”, McGraw-Hill, 1998 - M. J. Madou, “Fundamentals of Microfabrication", 2nd ed., CRC Press, 2002 | ||||
| Voraussetzungen / Besonderes | The information on the web can be updated until the beginning of the semester. | ||||
| 636-0301-00L | Current Topics in Biosystems Science and Engineering | 2 KP | 1S | T. Stadler, N. Beerenwinkel, Y. Benenson, K. M. Borgwardt, P. S. Dittrich, M. Fussenegger, A. Hierlemann, D. Iber, M. H. Khammash, D. J. Müller, S. Panke, P. Pantazis, R. Paro, R. Platt, S. Reddy, T. Schroeder, J. Stelling | |
| Kurzbeschreibung | This seminar will feature invited lectures about recent advances and developments in systems biology, including topics from biology, bioengineering, and computational biology. | ||||
| Lernziel | To provide an overview of current systems biology research. | ||||
| Inhalt | The final list of topics will be available at http://www.bsse.ethz.ch/education/. | ||||