Christofer Hierold: Katalogdaten im Frühjahrssemester 2018

NameHerr Prof. Dr. Christofer Hierold
LehrgebietMikro- und Nanosysteme
Adresse
Chair in Micro and Nanosystems
ETH Zürich, CLA G 9
Tannenstrasse 3
8092 Zürich
SWITZERLAND
Telefon+41 44 632 31 43
Fax+41 44 632 14 62
E-Mailchristofer.hierold@micro.mavt.ethz.ch
DepartementMaschinenbau und Verfahrenstechnik
BeziehungOrdentlicher Professor

NummerTitelECTSUmfangDozierende
151-0172-00LMicrosystems II: Devices and Applications Information 6 KP3V + 3UC. Hierold, C. I. Roman
KurzbeschreibungThe students are introduced to the fundamentals and physics of microelectronic devices as well as to microsystems in general (MEMS). They will be able to apply this knowledge for system research and development and to assess and apply principles, concepts and methods from a broad range of technical and scientific disciplines for innovative products.
LernzielThe students are introduced to the fundamentals and physics of microelectronic devices as well as to microsystems in general (MEMS), basic electronic circuits for sensors, RF-MEMS, chemical microsystems, BioMEMS and microfluidics, magnetic sensors and optical devices, and in particular to the concepts of Nanosystems (focus on carbon nanotubes), based on the respective state-of-research in the field. They will be able to apply this knowledge for system research and development and to assess and apply principles, concepts and methods from a broad range of technical and scientific disciplines for innovative products.

During the weekly 3 hour module on Mondays dedicated to Übungen the students will learn the basics of Comsol Multiphysics and utilize this software to simulate MEMS devices to understand their operation more deeply and optimize their designs.
InhaltTransducer fundamentals and test structures
Pressure sensors and accelerometers
Resonators and gyroscopes
RF MEMS
Acoustic transducers and energy harvesters
Thermal transducers and energy harvesters
Optical and magnetic transducers
Chemical sensors and biosensors, microfluidics and bioMEMS
Nanosystem concepts
Basic electronic circuits for sensors and microsystems
SkriptHandouts (on-line)
151-0620-00LEmbedded MEMS Lab5 KP3PC. Hierold, S. Blunier, M. Haluska
KurzbeschreibungPractical course: Students are introduced to the process steps required for the fabrication of MEMS (Micro Electro Mechanical System) and carry out the fabrication and testing steps in the clean rooms themselves. Additionally, they learn the requirements for working in clean rooms. Processing and characterization will be documented and analyzed in a final report.
LernzielStudents learn the individual process steps that are required to make a MEMS (Micro Electro Mechanical System). Students carry out the process steps themselves in laboratories and clean rooms. Furthermore, participants become familiar with the special requirements (cleanliness, safety, operation of equipment and handling hazardous chemicals) of working in the clean rooms and laboratories. The entire production, processing, and characterization of the MEMS is documented and evaluated in a final report.
InhaltWith guidance from a tutor, the individual silicon microsystem process steps that are required for the fabrication of an accelerometer are carried out:
- Photolithography, dry etching, wet etching, sacrificial layer etching, various cleaning procedures
- Packaging and electrical connection of a MEMS device
- Testing and characterization of the MEMS device
- Written documentation and evaluation of the entire production, processing and characterization
SkriptA document containing theory, background and practical course content is distributed in the informational meeting.
LiteraturThe document provides sufficient information for the participants to successfully participate in the course.
Voraussetzungen / BesonderesParticipating students are required to attend all scheduled lectures and meetings of the course.

Participating students are required to provide proof that they have personal accident insurance prior to the start of the laboratory portion of the course.

This master's level course is limited to 15 students per semester for safety and efficiency reasons.
If there are more than 15 students registered, we regret to restrict access to this course by the following rules:

Priority 1: master students of the master's program in "Micro and Nanosystems"

Priority 2: master students of the master's program in "Mechanical Engineering" with a specialization in Microsystems and Nanoscale Engineering (MAVT-tutors Profs Dual, Hierold, Koumoutsakos, Nelson, Norris, Park, Poulikakos, Pratsinis, Stemmer), who attended the bachelor course "151-0621-00L Microsystems Technology" successfully.

Priority 3: master students, who attended the bachelor course "151-0621-00L Microsystems Technology" successfully.

Priority 4: all other students (PhD, bachelor, master) with a background in silicon or microsystems process technology.

If there are more students in one of these priority groups than places available, we will decide (in following order) best achieved grade from 151-0621-00L Microsystems Technology, registration to this practicum at previous semester, and by drawing lots.
Students will be notified at the first lecture of the course (introductory lecture) as to whether they are able to participate.

The course is offered in autumn and spring semester.
151-0642-00LSeminar on Micro and Nanosystems0 KP1SC. Hierold
KurzbeschreibungWissenschaftliche Vorträge zu ausgewählten Themen der Mikro- und Nanosystemtechnik
LernzielDie Studierenden erhalten Einblick in den neuesten Stand der Forschung auf dem Gebiet und erhalten die Möglichkeit durch gezielte Fragen eine wissenschaftliche Diskussion mit den Referenten zu führen.
InhaltAusgewählte und aktuelle Themen der Mikro- und Nanosystemtechnik, Berichte von laufenden Doktoratsprojekten.