Suchergebnis: Katalogdaten im Frühjahrssemester 2018

Nummer	Titel	Typ	ECTS	Umfang	Dozierende
Mikro- und Nanosysteme Master
Kernfächer
Empfohlene Kernfächer
Devices and Systems
151-0172-00L	Microsystems II: Devices and Applications	W	6 KP	3V + 3U	C. Hierold, C. I. Roman
Kurzbeschreibung	The students are introduced to the fundamentals and physics of microelectronic devices as well as to microsystems in general (MEMS). They will be able to apply this knowledge for system research and development and to assess and apply principles, concepts and methods from a broad range of technical and scientific disciplines for innovative products.
Lernziel	The students are introduced to the fundamentals and physics of microelectronic devices as well as to microsystems in general (MEMS), basic electronic circuits for sensors, RF-MEMS, chemical microsystems, BioMEMS and microfluidics, magnetic sensors and optical devices, and in particular to the concepts of Nanosystems (focus on carbon nanotubes), based on the respective state-of-research in the field. They will be able to apply this knowledge for system research and development and to assess and apply principles, concepts and methods from a broad range of technical and scientific disciplines for innovative products. During the weekly 3 hour module on Mondays dedicated to Übungen the students will learn the basics of Comsol Multiphysics and utilize this software to simulate MEMS devices to understand their operation more deeply and optimize their designs.
Inhalt	Transducer fundamentals and test structures Pressure sensors and accelerometers Resonators and gyroscopes RF MEMS Acoustic transducers and energy harvesters Thermal transducers and energy harvesters Optical and magnetic transducers Chemical sensors and biosensors, microfluidics and bioMEMS Nanosystem concepts Basic electronic circuits for sensors and microsystems
Skript	Handouts (on-line)
227-0662-00L	Organic and Nanostructured Optics and Electronics Findet dieses Semester nicht statt.	W	6 KP	4G	V. Wood
Kurzbeschreibung	This course examines the optical and electronic properties of excitonic materials that can be leveraged to create thin-film light emitting devices and solar cells. Laboratory sessions provide students with experience in synthesis and optical characterization of nanomaterials as well as fabrication and characterization of thin film devices.
Lernziel	Gain the knowledge and practical experience to begin research with organic or nanostructured materials and understand the key challenges in this rapidly emerging field.
Inhalt	0-Dimensional Excitonic Materials (organic molecules and colloidal quantum dots) Energy Levels and Excited States (singlet and triplet states, optical absorption and luminescence). Excitonic and Polaronic Processes (charge transport, Dexter and Förster energy transfer, and exciton diffusion). Devices (photodetectors, solar cells, and light emitting devices).
Literatur	Lecture notes and reading assignments from current literature to be posted on website.
Voraussetzungen / Besonderes	Course grade will be based on a final project.

Energy Conversion and Quantum Phenomena
Nummer	Titel	Typ	ECTS	Umfang	Dozierende
151-0060-00L	Thermodynamics and Energy Conversion in Micro- and Nanoscale Technologies	W	4 KP	2V + 2U	D. Poulikakos, H. Eghlidi, T. Schutzius
Kurzbeschreibung	The lecture deals with both: the thermodynamics in nano- and microscale systems and the thermodynamics of ultra-fast phenomena. Typical areas of applications are microelectronics manufacturing and cooling, laser technology, manufacturing of novel materials and coatings, surface technologies, wetting phenomena and related technologies, and micro- and nanosystems and devices.
Lernziel	The student will acquire fundamental knowledge of micro and nanoscale interfacial thermofluidics including light interaction with surfaces. Furthermore, the student will be exposed to a host of applications ranging from superhydrophobic surfaces and microelectronics cooling to biofluidics and solar energy, all of which will be discussed in the context of the course.
Inhalt	Thermodynamic aspects of intermolecular forces, Molecular dynamics; Interfacial phenomena; Surface tension; Wettability and contact angle; Wettability of Micro/Nanoscale textured surfaces: superhydrophobicity and superhydrophilicity. Physics of micro- and nanofluidics. Principles of electrodynamics and optics; Optical waves at interfaces; Plasmonics: principles and applications.
Skript	yes
402-0468-15L	Nanomaterials for Photonics	W	6 KP	2V + 1U	R. Grange
Kurzbeschreibung	The lecture describes various nanomaterials (semiconductor, metal, dielectric, carbon-based...) for photonic applications (optoelectronics, plasmonics, photonic crystal...). It starts with nanophotonic concepts of light-matter interactions, then the fabrication methods, the optical characterization techniques, the description of the properties and the state-of-the-art applications.
Lernziel	The students will acquire theoretical and experimental knowledge in the different types of nanomaterials (semiconductors, metals, dielectric, carbon-based, ...) and their uses as building blocks for advanced applications in photonics (optoelectronics, plasmonics, photonic crystal, ...). Together with the exercises, the students will learn (1) to read, summarize and discuss scientific articles related to the lecture, (2) to estimate order of magnitudes with calculations using the theory seen during the lecture, (3) to prepare a short oral presentation about one topic related to the lecture, and (4) to imagine a useful photonic device.
Inhalt	1. Introduction to Nanomaterials for photonics a. Classification of the materials in sizes and speed... b. General info about scattering and absorption c. Nanophotonics concepts 2. Analogy between photons and electrons a. Wavelength, wave equation b. Dispersion relation c. How to confine electrons and photons d. Tunneling effects 3. Characterization of Nanomaterials a. Optical microscopy: Bright and dark field, fluorescence, confocal, High resolution: PALM (STORM), STED b. Electron microscopy : SEM, TEM c. Scanning probe microscopy: STM, AFM d. Near field microscopy: SNOM e. X-ray diffraction: XRD, EDS 4. Generation of Nanomaterials a. Top-down approach b. Bottom-up approach 5. Plasmonics a. What is a plasmon, Drude model b. Surface plasmon and localized surface plasmon (sphere, rod, shell) c. Theoretical models to calculate the radiated field: electrostatic approximation and Mie scattering d. Fabrication of plasmonic structures: Chemical synthesis, Nanofabrication e. Applications 6. Organic nanomaterials a. Organic quantum-confined structure: nanomers and quantum dots. b. Carbon nanotubes: properties, bandgap description, fabrication c. Graphene: motivation, fabrication, devices 7. Semiconductors a. Crystalline structure, wave function... b. Quantum well: energy levels equation, confinement c. Quantum wires, quantum dots d. Optical properties related to quantum confinement e. Example of effects: absorption, photoluminescence... f. Solid-state-lasers : edge emitting, surface emitting, quantum cascade 8. Photonic crystals a. Analogy photonic and electronic crystal, in nature b. 1D, 2D, 3D photonic crystal c. Theoretical modeling: frequency and time domain technique d. Features: band gap, local enhancement, superprism... 9. Optofluidic a. What is optofluidic ? b. History of micro-nano-opto-fluidic c. Basic properties of fluids d. Nanoscale forces and scale law e. Optofluidic: fabrication f. Optofluidic: applications g. Nanofluidics 10. Nanomarkers a. Contrast in imaging modalities b. Optical imaging mechanisms c. Static versus dynamic probes
Skript	Slides and book chapter will be available for downloading
Literatur	References will be given during the lecture
Voraussetzungen / Besonderes	Basics of solid-state physics (i.e. energy bands) can help
402-0596-00L	Electronic Transport in Nanostructures	W	6 KP	2V + 1U	T. M. Ihn
Kurzbeschreibung	The lecture discusses basic quantum phenomena occurring in electron transport through nanostructures: Drude theory, Landauer-Buttiker theory, conductance quantization, Aharonov-Bohm effect, weak localization/antilocalization, shot noise, integer and fractional quantum Hall effects, tunneling transport, Coulomb blockade, coherent manipulation of charge- and spin-qubits.
Lernziel
Skript	The lecture is based on the book: T. Ihn, Semiconductor Nanostructures: Quantum States and Electronic Transport, ISBN 978-0-19-953442-5, Oxford University Press, 2010.
Voraussetzungen / Besonderes	A solid basis in quantum mechanics, electrostatics, quantum statistics and in solid state physics is required. Students of the Master in Micro- and Nanosystems should at least have attended the lecture by David Norris, Introduction to quantum mechanics for engineers. They should also have passed the exam of the lecture Semiconductor Nanostructures.
529-0431-00L	Physikalische Chemie III: Molekulare Quantenmechanik	W	4 KP	4G	B. H. Meier, M. Ernst
Kurzbeschreibung	Postulate der Quantenmechanik, Operatorenalgebra, Schrödingergleichung, Zustandsfunktionen und Erwartungswerte, Matrixdarstellung von Operatoren, das Teilchen im Kasten, Tunnelprozess, harmonische Oszillator, molekulare Schwingungen, Drehimpuls und Spin, verallgemeinertes Pauli Prinzip, Störungstheorie, Variationsprinzip, elektronische Struktur von Atomen und Molekülen, Born-Oppenheimer Näherung.
Lernziel	Es handelt sich um eine erste Grundvorlesung in Quantenmechanik. Die Vorlesung beginnt mit einem Überblick über die grundlegenden Konzepte der Quantenmechanik und führt den mathematischen Formalismus ein. Im Folgenden werden die Postulate und Theoreme der Quantenmechanik im Kontext der experimentellen und rechnerischen Ermittlung von physikalischen Grössen diskutiert. Die Vorlesung vermittelt die notwendigen Werkzeuge für das Verständnis der elementaren Quantenphänomene in Atomen und Molekülen.
Inhalt	Postulate und Theoreme der Quantenmechanik: Operatorenalgebra, Schrödingergleichung, Zustandsfunktionen und Erwartungswerte. Lineare Bewegungen: Das freie Teilchen, das Teilchen im Kasten, quantenmechanisches Tunneln, der harmonische Oszillator und molekulare Schwingungen. Drehimpulse: Spin- und Bahnbewegungen, molekulare Rotationen. Elektronische Struktur von Atomen und Molekülen: Pauli-Prinzip, Drehimpulskopplung, Born-Oppenheimer Näherung. Grundlagen der Variations- und Störungtheorie. Behandlung grösserer Systeme (Festkörper, Nanostrukturen).
Skript	Ein Vorlesungsskript in Deutsch wird abgegeben. Das Skipt ersetzt allerdings persönliche Notizen NICHT und deckt nicht alle Aspekte der Vorlesung ab.

Material, Surfaces and Properties
Nummer	Titel	Typ	ECTS	Umfang	Dozierende
151-0902-00L	Micro- and Nanoparticle Technology	W	6 KP	2V + 2U	S. E. Pratsinis, K. Wegner, M. Eggersdorfer
Kurzbeschreibung	Einführung in die Mikro- und Nanopartikelsynthese und Verarbeitung: Theoretische Grundlagen von Fluid/Feststoff Systemen; Fragmentation; Koagulation; Wachstum; Transport-, Misch- undTrennprozesse; Filtration; Wirbelschichten; Beschichtungen; Probenentnahme- und Messtechniken; Charakterisierung von Suspensionen; Partikelverarbeitung zur Herstellung von Katalysatoren, Sensoren und Nanokompositen.
Lernziel	Einarbeitung in Auslegungsmethoden von mechanischen Verfahren, Scale-up-Gesetze, optimaler Stoff- und Energie-Einsatz.
Inhalt	Charakterisierung von Kollektiven von Feststoffen und zugehörige Messtechniken; Grundgesetze von Gas/Feststoff- bzw. Flüssig/Feststoffsystemen; Grundoperationen mechanischer Verfahren: Zerkleinern, Agglomerieren; Themen wie Sieben, Sichten, Sedimentieren, Filtrieren, Abscheiden von Partikeln aus Gasströmen, Mischen, Lagern, Fördern; Einbau der Verfahrensschritte in Gesamtverfahren der Chemischen Industrie, Zementindustrie etc.
Skript	Mechanische Verfahrenstechnik I

Modelling and Simulation
Nummer	Titel	Typ	ECTS	Umfang	Dozierende
401-3632-00L	Computational Statistics	W	10 KP	3V + 2U	M. H. Maathuis
Kurzbeschreibung	Computational Statistics deals with modern statistical methods of data analysis (aka "data science") for prediction and inference. The course provides an overview of existing methods. The course is hands-on, and methods are applied using the statistical programming language R.
Lernziel	In this class, the student obtains an overview of modern statistical methods for data analysis, including their algorithmic aspects and theoretical properties. The methods are applied using the statistical programming language R.
Voraussetzungen / Besonderes	At least one semester of (basic) probability and statistics. Programming experience is helpful but not required.
151-0116-10L	High Performance Computing for Science and Engineering (HPCSE) for Engineers II	W	4 KP	4G	P. Koumoutsakos, P. Chatzidoukas
Kurzbeschreibung	This course focuses on programming methods and tools for parallel computing on multi and many-core architectures. Emphasis will be placed on practical and computational aspects of Uncertainty Quantification and Propagation including the implementation of relevant algorithms on HPC architectures.
Lernziel	The course will teach - programming models and tools for multi and many-core architectures - fundamental concepts of Uncertainty Quantification and Propagation (UQ+P) for computational models of systems in Engineering and Life Sciences
Inhalt	High Performance Computing: - Advanced topics in shared-memory programming - Advanced topics in MPI - GPU architectures and CUDA programming Uncertainty Quantification: - Uncertainty quantification under parametric and non-parametric modeling uncertainty - Bayesian inference with model class assessment - Markov Chain Monte Carlo simulation
Skript	http://www.cse-lab.ethz.ch/index.php/teaching/42-teaching/classes/704-hpcse2 Class notes, handouts
Literatur	- Class notes - Introduction to High Performance Computing for Scientists and Engineers, G. Hager and G. Wellein - CUDA by example, J. Sanders and E. Kandrot - Data Analysis: A Bayesian Tutorial, Devinderjit Sivia

Laboratory Course
Nummer	Titel	Typ	ECTS	Umfang	Dozierende
151-0620-00L	Embedded MEMS Lab	W	5 KP	3P	C. Hierold, S. Blunier, M. Haluska
Kurzbeschreibung	Practical course: Students are introduced to the process steps required for the fabrication of MEMS (Micro Electro Mechanical System) and carry out the fabrication and testing steps in the clean rooms themselves. Additionally, they learn the requirements for working in clean rooms. Processing and characterization will be documented and analyzed in a final report.
Lernziel	Students learn the individual process steps that are required to make a MEMS (Micro Electro Mechanical System). Students carry out the process steps themselves in laboratories and clean rooms. Furthermore, participants become familiar with the special requirements (cleanliness, safety, operation of equipment and handling hazardous chemicals) of working in the clean rooms and laboratories. The entire production, processing, and characterization of the MEMS is documented and evaluated in a final report.
Inhalt	With guidance from a tutor, the individual silicon microsystem process steps that are required for the fabrication of an accelerometer are carried out: - Photolithography, dry etching, wet etching, sacrificial layer etching, various cleaning procedures - Packaging and electrical connection of a MEMS device - Testing and characterization of the MEMS device - Written documentation and evaluation of the entire production, processing and characterization
Skript	A document containing theory, background and practical course content is distributed in the informational meeting.
Literatur	The document provides sufficient information for the participants to successfully participate in the course.
Voraussetzungen / Besonderes	Participating students are required to attend all scheduled lectures and meetings of the course. Participating students are required to provide proof that they have personal accident insurance prior to the start of the laboratory portion of the course. This master's level course is limited to 15 students per semester for safety and efficiency reasons. If there are more than 15 students registered, we regret to restrict access to this course by the following rules: Priority 1: master students of the master's program in "Micro and Nanosystems" Priority 2: master students of the master's program in "Mechanical Engineering" with a specialization in Microsystems and Nanoscale Engineering (MAVT-tutors Profs Dual, Hierold, Koumoutsakos, Nelson, Norris, Park, Poulikakos, Pratsinis, Stemmer), who attended the bachelor course "151-0621-00L Microsystems Technology" successfully. Priority 3: master students, who attended the bachelor course "151-0621-00L Microsystems Technology" successfully. Priority 4: all other students (PhD, bachelor, master) with a background in silicon or microsystems process technology. If there are more students in one of these priority groups than places available, we will decide (in following order) best achieved grade from 151-0621-00L Microsystems Technology, registration to this practicum at previous semester, and by drawing lots. Students will be notified at the first lecture of the course (introductory lecture) as to whether they are able to participate. The course is offered in autumn and spring semester.

Wählbare Kernfächer
Nummer	Titel	Typ	ECTS	Umfang	Dozierende
151-0211-00L	Convective Heat Transport Findet dieses Semester nicht statt.	W	5 KP	4G	H. G. Park
Kurzbeschreibung	This course will teach the field of heat transfer by convection. This heat transport process is intimately tied to fluid dynamics and mathematics, meaning that solid background in these disciplines are necessary. Convection has direct implications in various industries, e.g. microfabrication, microfluidics, microelectronics cooling, thermal shields protection for space shuttles.
Lernziel	Advanced introduction to the field of heat transfer by convection.
Inhalt	The course covers the following topics: 1. Introduction: Fundamentals and Conservation Equations 2. Laminar Fully Developed Velocity and Temperature Fields 3. Laminar Thermally Developing Flows 4. Laminar Hydrodynamic Boundary Layers 5. Laminar Thermal Boundary Layers 6. Laminar Thermal Boundary Layers with Viscous Dissipation 7. Turbulent Flows 8. Natural Convection.
Skript	Lecture notes will be delivered in class via note-taking. Textbook serves as a great source of the lecture notes.
Literatur	Text: (Main) Kays and Crawford, Convective Heat and Mass Transfer, McGraw-Hill, Inc. (Secondary) A. Bejan, Convection Heat Transfer References: Incropera and De Witt, Fundamentals of Heat and Mass Transfer, or Introduction to Heat Transfer Kundu and Cohen, Fluid Mechanics, Academic Press V. Arpaci, Convection Heat Transfer
151-0361-00L	An Introduction to the Finite-Element Method	W	4 KP	3G	G. Kress, C. Thurnherr
Kurzbeschreibung	The class includes mathematical ancillary concepts, derivation of element equations, numerical integration, boundary conditions and degree-of-freedom coupling, compilation of the system’s equations, element technology, solution methods, static and eigenvalue problems, iterative solution of progressing damage, beam-locking effect, modeling techniques, implementation of nonlinear solution methods.
Lernziel	Obtain a theoretical background of the finite-element method. Understand techniques for finding numerically more efficient finite elements. Understand degree-of-freedom coupling schemes and recall typical equations solution algorithms for static and eigenvalue problems. Learn how to map specific mechanical situations correctly to finite-element models. Understand how to make best use of FEM for structural analysis. Obtain a first inside into the implementation of nonlinear FEM procedures.
Inhalt	1. Introduction, direct element derivation of truss element 2. Variational methods and truss element revisited 3. Variational methods and derivation of planar finite elements 4. Curvilinear finite elements and numerical integration 5. Element Technology 6. Degrees-of-freedom coupling and solution methods 7. Iterative solution methods for damage progression analysis 8. Shear-rigid and shear compliant beam elements and locking effect 9. Beam Elements and Locking Effect 10. Harmonic vibrations and vector iteration 11. Modeling techniques 12. Implementation of nonlinear FEM procedures
Skript	Script and handouts are provided in class and can also be down-loaded from: Link
Literatur	No textbooks required.
151-0534-00L	Advanced Dynamics	W	4 KP	3V + 1U	P. Tiso
Kurzbeschreibung	Lagrangian dynamics - Principle of virtual work and virtual power - holonomic and non holonomic contraints - 3D rigid body dynamics - equilibrium - linearization - stability - vibrations - frequency response
Lernziel	This course provides the students of mechanical engineering with fundamental analytical mechanics for the study of complex mechanical systems .We introduce the powerful techniques of principle of virtual work and virtual power to systematically write the equation of motion of arbitrary systems subjected to holonomic and non-holonomic constraints. The linearisation around equilibrium states is then presented, together with the concept of linearised stability. Linearized models allow the study of small amplitude vibrations for unforced and forced systems. For this, we introduce the concept of vibration modes and frequencies, modal superposition and modal truncation. The case of the vibration of light damped systems is discussed. The kinematics and dynamics of 3D rigid bodies is also extensively treated.
Skript	Lecture notes are produced in class and are downloadable right after each lecture.
Literatur	The students will prepare their own notes. A copy of the lecture notes will be available.
Voraussetzungen / Besonderes	Mechanics III or equivalent; Analysis I-II, or equivalent; Linear Algebra I-II, or equivalent.
151-0622-00L	Measuring on the Nanometer Scale	W	2 KP	2G	A. Stemmer, T. Wagner
Kurzbeschreibung	Introduction to theory and practical application of measuring techniques suitable for the nano domain.
Lernziel	Introduction to theory and practical application of measuring techniques suitable for the nano domain.
Inhalt	Conventional techniques to analyze nano structures using photons and electrons: light microscopy with dark field and differential interference contrast; scanning electron microscopy, transmission electron microscopy. Interferometric and other techniques to measure distances. Optical traps. Foundations of scanning probe microscopy: tunneling, atomic force, optical near-field. Interactions between specimen and probe. Current trends, including spectroscopy of material parameters.
Skript	Class notes and special papers will be distributed.
151-0630-00L	Nanorobotics	W	4 KP	2V + 1U	S. Pané Vidal
Kurzbeschreibung	Nanorobotics is an interdisciplinary field that includes topics from nanotechnology and robotics. The aim of this course is to expose students to the fundamental and essential aspects of this emerging field.
Lernziel	The aim of this course is to expose students to the fundamental and essential aspects of this emerging field. These topics include basic principles of nanorobotics, building parts for nanorobotic systems, powering and locomotion of nanorobots, manipulation, assembly and sensing using nanorobots, molecular motors, and nanorobotics for nanomedicine.
151-0642-00L	Seminar on Micro and Nanosystems	Z	0 KP	1S	C. Hierold
Kurzbeschreibung	Wissenschaftliche Vorträge zu ausgewählten Themen der Mikro- und Nanosystemtechnik
Lernziel	Die Studierenden erhalten Einblick in den neuesten Stand der Forschung auf dem Gebiet und erhalten die Möglichkeit durch gezielte Fragen eine wissenschaftliche Diskussion mit den Referenten zu führen.
Inhalt	Ausgewählte und aktuelle Themen der Mikro- und Nanosystemtechnik, Berichte von laufenden Doktoratsprojekten.
151-0735-00L	Dynamic Behavior of Materials and Structures Findet dieses Semester nicht statt.	W	4 KP	2V + 2U	D. Mohr
Kurzbeschreibung	Lectures and computer labs concerned with the modeling of the deformation response and failure of engineering materials (metals, polymers and composites) subject to extreme loadings during manufacturing, crash, impact and blast events.
Lernziel	Students will learn to apply, understand and develop computational models of a large spectrum of engineering materials to predict their dynamic deformation response and failure in finite element simulations. Students will become familiar with important dynamic testing techniques to identify material model parameters from experiments. The ultimate goal is to provide the students with the knowledge and skills required to engineer modern multi-material solutions for high performance structures in automotive, aerospace and navel engineering.
Inhalt	Topics include viscoelasticity, temperature and rate dependent plasticity, dynamic brittle and ductile fracture; impulse transfer, impact and wave propagation in solids; computational aspects of material model implementation into hydrocodes; simulation of dynamic failure of structures;
Skript	Slides of the lectures, relevant journal papers and users manuals will be provided.
Literatur	Various books will be recommended covering the topics discussed in class
Voraussetzungen / Besonderes	Course in continuum mechanics (mandatory), finite element method (recommended)
151-0966-00L	Introduction to Quantum Mechanics for Engineers	W	4 KP	2V + 2U	D. J. Norris
Kurzbeschreibung	This course provides fundamental knowledge in the principles of quantum mechanics and connects it to applications in engineering.
Lernziel	To work effectively in many areas of modern engineering, such as renewable energy and nanotechnology, students must possess a basic understanding of quantum mechanics. The aim of this course is to provide this knowledge while making connections to applications of relevancy to engineers. After completing this course, students will understand the basic postulates of quantum mechanics and be able to apply mathematical methods for solving various problems including atoms, molecules, and solids. Additional examples from engineering disciplines will also be integrated.
Inhalt	Fundamentals of Quantum Mechanics - Historical Perspective - Schrödinger Equation - Postulates of Quantum Mechanics - Operators - Harmonic Oscillator - Hydrogen atom - Multielectron Atoms - Crystalline Systems - Spectroscopy - Approximation Methods - Applications in Engineering
Skript	Class Notes and Handouts
Literatur	Text: David J. Griffiths, Introduction to Quantum Mechanics, 2nd Edition, Pearson International Edition.
Voraussetzungen / Besonderes	Analysis III, Mechanics III, Physics I, Linear Algebra II
227-0158-00L	Semiconductor Devices: Transport Theory and Monte Carlo Simulation Findet dieses Semester nicht statt.	W	4 KP	2V + 1U
Kurzbeschreibung	The first part deals with semiconductor transport theory including the necessary quantum mechanics. In the second part, the Boltzmann equation is solved with the stochastic methods of Monte Carlo simulation. The exercises address also TCAD simulations of MOSFETs. Thus the topics include theoretical physics, numerics and practical applications.
Lernziel	On the one hand, the link between microscopic physics and its concrete application in device simulation is established; on the other hand, emphasis is also laid on the presentation of the numerical techniques involved.
Inhalt	Quantum theoretical foundations I (state vectors, Schroedinger and Heisenberg picture). Band structure (Bloch theorem, one dimensional periodic potential, density of states). Pseudopotential theory (crystal symmetries, reciprocal lattice, Brillouin zone). Semiclassical transport theory (Boltzmann transport equation (BTE), scattering processes, linear transport).<br> Monte Carlo method (Monte Carlo simulation as solution method of the BTE, algorithm, expectation values).<br> Implementational aspects of the Monte Carlo algorithm (discretization of the Brillouin zone, self-scattering according to Rees, acceptance- rejection method etc.). Bulk Monte Carlo simulation (velocity-field characteristics, particle generation, energy distributions, transport parameters). Monte Carlo device simulation (ohmic boundary conditions, MOSFET simulation). Quantum theoretical foundations II (limits of semiclassical transport theory, quantum mechanical derivation of the BTE, Markov-Limes).
Skript	Lecture notes (in German)
227-0159-00L	Semiconductor Devices: Quantum Transport at the Nanoscale	W	6 KP	2V + 2U	M. Luisier, A. Emboras
Kurzbeschreibung	This class offers an introduction into quantum transport theory, a rigorous approach to electron transport at the nanoscale. It covers different topics such as bandstructure, Wave Function and Non-equilibrium Green's Function formalisms, and electron interactions with their environment. Matlab exercises accompany the lectures where students learn how to develop their own transport simulator.
Lernziel	The continuous scaling of electronic devices has given rise to structures whose dimensions do not exceed a few atomic layers. At this size, electrons do not behave as particle any more, but as propagating waves and the classical representation of electron transport as the sum of drift-diffusion processes fails. The purpose of this class is to explore and understand the displacement of electrons through nanoscale device structures based on state-of-the-art quantum transport methods and to get familiar with the underlying equations by developing his own nanoelectronic device simulator.
Inhalt	The following topics will be addressed: - Introduction to quantum transport modeling - Bandstructure representation and effective mass approximation - Open vs closed boundary conditions to the Schrödinger equation - Comparison of the Wave Function and Non-equilibrium Green's Function formalisms as solution to the Schrödinger equation - Self-consistent Schödinger-Poisson simulations - Quantum transport simulations of resonant tunneling diodes and quantum well nano-transistors - Top-of-the-barrier simulation approach to nano-transistor - Electron interactions with their environment (phonon, roughness, impurity,...) - Multi-band transport models
Skript	Lecture slides are distributed every week and can be found at https://iis-students.ee.ethz.ch/lectures/quantum-transport-in-nanoscale-devices/
Literatur	Recommended textbook: "Electronic Transport in Mesoscopic Systems", Supriyo Datta, Cambridge Studies in Semiconductor Physics and Microelectronic Engineering, 1997
Voraussetzungen / Besonderes	Basic knowledge of semiconductor device physics and quantum mechanics

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