Suchergebnis: Katalogdaten im Herbstsemester 2022

Maschineningenieurwissenschaften Bachelor Information
Bachelor-Studium (Studienreglement 2010)
Mikrosysteme und Nanotechnologie
Fokus-Koordinator: Prof. Christofer Hierold
151-0621-00LMicrosystems I: Process Technology and IntegrationW+6 KP3V + 3UM. Haluska, C. Hierold
KurzbeschreibungDie Stundenten werden in die Grundlagen der Mikrosystemtechnik, der Halbleiterphysik und der Halbleiterprozesstechnologie eingeführt und erfahren, wie die Herstellung von Mikrosystemen in einer Serie von genau definierten Prozessschritten erfolgt (Gesamtprozess und Prozessablauf).
LernzielDie Stundenten sind mit den Grundlagen der Mikrosystemtechnik und der Prozesstechnologie für Halbleiter vertraut und verstehen die Herstellung von Mikrosystemen durch die Kombination von Einzelprozesschritten ( = Gesamtprozess oder Prozessablauf).
Inhalt- Einführung in die Mikrosystemtechnik (MST) und in mikroelektromechanische Systeme (MEMS)
- Grundlegende Siliziumtechnologie: thermische Oxidation, Fotolithografie und Ätztechnik, Diffusion und Ionenimplantation, Dünnschichttechnik.
- Besondere Mikrosystemtechnologien: Volumen- und Oberflächenmikromechanik, Trocken- und Nassätzen, isotropisches und anisotropisches Ätzen, Herstellung von Balken und Membranen, Waferbonden, mechanische Eigenschaften von Dünnschichten.
Die Anwendung ausgewählter Technologien wird anhand von Fallstudien nachgewiesen.
SkriptHandouts (online erhältlich)
Literatur- S.M. Sze: Semiconductor Devices, Physics and Technology
- W. Menz, J. Mohr, O.Paul: Microsystem Technology
- Hong Xiao: Introduction to Semiconductor Manufacturing Technology
- M. J. Madou: Fundamentals of Microfabrication and Nanotechnology, 3rd ed.
- T. M. Adams, R. A. Layton: Introductory MEMS, Fabrication and Applications
Voraussetzungen / BesonderesVoraussetzung: Physik I und II
151-0509-00LAcoustics in Fluid Media: From Robotics to Additive Manufacturing
Note: The previous course title until HS21 "Microscale Acoustofluidics"
W4 KP3GD. Ahmed
KurzbeschreibungThe course will provide you with the fundamentals of the new and exciting field of ultrasound-based microrobots to treat various diseases. Furthermore, we will explore how ultrasound can be used in additive manufacturing for tissue constructs and robotics.
LernzielThe course is designed to equip students with skills in the design and development of ultrasound-based manipulation devices and microrobots for applications in medicine and additive manufacturing.
InhaltLinear and nonlinear acoustics, foundations of fluid and solid mechanics and piezoelectricity, Gorkov potential, numerical modelling, acoustic streaming, applications from ultrasonic microrobotics to surface acoustic wave devices
SkriptYes, incl. Chapters from the Tutorial: Microscale Acoustofluidics, T. Laurell and A. Lenshof, Ed., Royal Society of Chemistry, 2015
LiteraturMicroscale Acoustofluidics, T. Laurell and A. Lenshof, Ed., Royal Society of Chemistry, 2015
Voraussetzungen / BesonderesSolid and fluid continuum mechanics. Notice: The exercise part is a mixture of presentation, lab sessions ( both compulsary) and hand in homework.
Geförderte KompetenzenGeförderte Kompetenzen
Fachspezifische KompetenzenKonzepte und Theoriengeprüft
Verfahren und Technologiengeprüft
Methodenspezifische KompetenzenAnalytische Kompetenzengeprüft
Entscheidungsfindungnicht geprüft
Medien und digitale Technologiennicht geprüft
Projektmanagementnicht geprüft
Soziale KompetenzenKommunikationgeprüft
Kooperation und Teamarbeitgeprüft
Kundenorientierungnicht geprüft
Menschenführung und Verantwortungnicht geprüft
Selbstdarstellung und soziale Einflussnahmegeprüft
Sensibilität für Vielfalt nicht geprüft
Verhandlungnicht geprüft
Persönliche KompetenzenKritisches Denkengeprüft
Integrität und Arbeitsethikgeprüft
Selbststeuerung und Selbstmanagement geprüft
151-0604-00LMicrorobotics Information W4 KP3GB. Nelson
KurzbeschreibungMicrorobotics is an interdisciplinary field that combines aspects of robotics, micro and nanotechnology, biomedical engineering, and materials science. The aim of this course is to expose students to the fundamentals of this emerging field. Throughout the course, the students apply these concepts in assignments. The course concludes with an end-of-semester examination.
LernzielThe objective of this course is to expose students to the fundamental aspects of the emerging field of microrobotics. This includes a focus on physical laws that predominate at the microscale, technologies for fabricating small devices, bio-inspired design, and applications of the field.
InhaltMain topics of the course include:
- Scaling laws at micro/nano scales
- Electrostatics
- Electromagnetism
- Low Reynolds number flows
- Observation tools
- Materials and fabrication methods
- Applications of biomedical microrobots
SkriptThe powerpoint slides presented in the lectures will be made available as pdf files. Several readings will also be made available electronically.
Voraussetzungen / BesonderesThe lecture will be taught in English.
151-0643-00LStudies on Micro and Nano Systems
Dieser Kurs steht für Austauschstudierende nicht zur Verfügung.
W5 KP11ABetreuer/innen
KurzbeschreibungThe students get familiarized with the challenges of the fascinating and interdisciplinary field of Micro- and Nanosystems. They are introduced to the basics of independent non-experimental scientific research and are able to summarize and to present the results efficiently.
LernzielThe students get familiarized with the challenges of the fascinating and interdisciplinary field of Micro- and Nanosystems. They are introduced to the basics of independent non-experimental scientific research and are able to summarize and to present the results efficiently.
InhaltStudents work independently on a study of selected topics in the field of Micro- and Nanosystems. They start with a selection of scientific papers, and continue with an independent iterature research. The results (e.g. state-of-the-art, methods) are evaluated with respect to predefined criteria. Then the results are presented in an oral presentation and summarized in a report, which takes the discussion of the presentation into account.
LiteraturLiterature will be provided
151-0902-00LMicro- and Nanoparticle Technology Belegung eingeschränkt - Details anzeigen
Number of participants is limited to 20.
Additional ones could be enrolled by permission of the lecturer.
W6 KP2V + 2US. E. Pratsinis, V. Mavrantzas, K. Wegner
KurzbeschreibungParticles are everywhere and nano is the new scale in science & engineering as micro was ~200 years ago. For highly motivated students, this exceptionally demanding class gives a flavor of nanotechnology with hands-on student projects on gas-phase particle synthesis & applications capitalizing on particle dynamics (diffusion, coagulation etc.), shape, size distribution and characterization.
LernzielThis course aims to familiarize motivated M/BSc students with some of the basic phenomena of particles at the nanoscale, thereby illustrating the links between physics, chemistry, materials science through hands-on experience. Furthermore it aims to give an overview of the field with motivating lectures from industry and academia, including the development of technologies and processes based on particle technology with introduction to design methods of mechanical processes, scale-up laws and optimal use of materials and energy. Most importantly, this course aims to develop the creativity and sharpen the communication skills of motivated students through their individual projects, a PERFECT preparation for the M/BSc thesis (e.g. efficient & critical literature search, effective oral/written project presentations), the future profession itself and even life, in general, are always there!
InhaltThe course objectives are best met primarily through the individual student projects which may involve experiments, simulations or critical & quantitative reviews of the literature. Projects are conducted individually under the close supervision of MSc, PhD or post-doctoral students. Therein, a 2-page proposal is submitted within the first two semester weeks addressing explicitly, at least, 10 well-selected research articles and thoughtful meetings with the project supervisor. The proposal address 3 basic questions: a) how important is the project; b) what has been done already in that field and c) what will be done by the student. Detailed feedback on each proposal is given by the supervisor, assistant and professor two weeks later. Towards the end of the semester, a 10-minute oral presentation is given by the student followed by 10 minutes Q&A. A 10-page final report is submitted by noon of the last day of the semester. The project supervisor will provide guidance throughout the course. Lectures include some of the following:
- Overview & Project Presentation
- Particle Size Distribution
- Particle Diffusion
- Coagulation
- Agglomeration & Coalescence
- Particle Growth by Condensation
- Control of particle size & structure during gas-phase synthesis
- Multi-scale design of aerosol synthesis of particles
- Particle Characterization
- Aerosol manufacture of nanoparticles
- Forces acting on Single Particles in a Flow Field
- Fixed and Fluidized Beds
- Separations of Solid-Liquid & Solid-Gas systems
- Emulsions/droplet formation/microfluidics
- Gas Sensors
- Coaching for proposal & report writing as well as oral presentations
LiteraturSmoke, Dust and Haze, S.K. Friedlander, Oxford, 2nd ed., 2000
Aerosol Technology, W. Hinds, Wiley, 2nd Edition, 1999.
Aerosol Processing of Materials, T. Kodas M. Hampden-Smith, Wiley, 1999.
History of the Manufacture of Fine Particles in High-Temperature Aerosol Reactors in Aerosol Science and Technology: History and Reviews, ed. D.S. Ensor & K.N. Lohr, RTI Press, Ch. 18, pp. 475-507, 2011.
Flame aerosol synthesis of smart nanostructured materials, R. Strobel, S. E. Pratsinis, J. Mater. Chem., 17, 4743-4756 (2007).
Voraussetzungen / BesonderesFluidMechanik I, Thermodynamik I&II & "clean" 5th semester BSc student standing in D-MAVT (no block 1 or 2 obligations). Students attending this course are expected to allocate sufficient additional time within their weekly schedule to successfully conduct their project. As exceptional effort will be required! Having seen "Chasing Mavericks" (2012) by Apted & Henson, "Unbroken" (2014) by Angelina Jolie and, in particular, "The Salt of the Earth" (2014) by Wim Wenders might be helpful and even motivating. These movies show how methodic effort can bring superior and truly unexpected results (e.g. stay under water for 5 minutes to overcome the fear of riding huge waves or merciless Olympic athlete training that help survive 45 days on a raft in Pacific Ocean followed by 2 years in a Japanese POW camp during WWII).
151-0913-00LIntroduction to PhotonicsW4 KP2V + 2UR. Quidant, J. Ortega Arroyo
KurzbeschreibungThis course introduces students to the main concepts of optics and photonics. Specifically, we will describe the laws obeyed by optical waves and discuss how to use them to manipulate light.
LernzielPhotonics, the science of light, has become ubiquitous in our lives. Control and manipulation of light is what enables us to interact with the screen of our smart devices and exchange large amounts of complex information. Photonics has also taken a preponderant role in cutting-edge science, allowing for instance to image nanospecimens, detect diseases or sense very tiny forces. The purpose of this course is three-fold: (i) We first aim to provide the fundamentals of photonics, establishing a solid basis for more specialised courses. (ii) Beyond theoretical concepts, our intention is to have students develop an intuition on how to manipulate light in practise. (iii) Finally, the course highlights how the taught concepts apply to modern research as well as to everyday life technologies (LCD screens, polarisation sun glasses, anti-reflection coating etc...). Content, including videos of laboratory experiments, has been designed to be approachable by students from a diverse set of science and engineering backgrounds.
1) General concepts
2) Differential wave equation
3) Wavefront
4) Plane waves and Fourier decomposition of optical fields
5) Spherical waves and Huygens-Fresnel principle

1) Maxwell equations
2) Wave equation for EM waves
3) Dielectric permittivity
4) Refractive index
5) Nonlinear optics
6) Polarisation and polarisation control

1) Waves at an interface
2) The Fresnel equations
3) Total internal reflection
4) Evanescent waves
5) Dispersion diagram

1) General considerations
2) Temporal and spatial coherence
3) The Young double slit experiment
4) Diffraction gratings
5) The Michelson interferometer
6) Multi-wave interference
7) Antireflecting coating and interference filters
8) Optical holography

1) Optical waveguides
2) Photonic crystals
3) Metamaterials and metasurfaces
4) Optical cavities

1) Basic concepts
2) Direct and Fourier imaging
3) Image formation
4) Fluorescence microscopy
5) Scattering-based microscopy
6) Digital holography
7) Computational imaging

1) History of optical forces
2) Theory of optical trapping
3) Atom cooling
4) Optomechanics
5) Plasmonic trapping
6) Applications of optical tweezers
SkriptClass notes and handouts
LiteraturOptics (Hecht) - Pearson
Voraussetzungen / BesonderesPhysics I, Physics II
151-0135-00LErgänzendes Projekt für die Fokus-Vertiefung
Nur für D-MAVT Bachelor-Studierende der Fokusvertiefung.
Für die Belegung der Lerneinheit kontaktieren Sie bitte die D-MAVT Studienadministration.
W1 KP2AProfessor/innen
KurzbeschreibungSelbständige Einarbeitung in ein umgrenztes Teilgebiet der gewählten Fokus-Vertiefung
LernzielSelbständige Einarbeitung in ein umgrenztes Teilgebiet der gewählten Fokus-Vertiefung
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