402-0318-00L  Semiconductor Materials: Characterization, Processing and Devices

SemesterFrühjahrssemester 2021
DozierendeS. Schön, W. Wegscheider
Periodizitätjährlich wiederkehrende Veranstaltung


402-0318-00 VSemiconductor Materials: Characterization, Processing and Devices2 Std.
Di11:45-13:30HCP E 47.1 »
S. Schön, W. Wegscheider
402-0318-00 USemiconductor Materials: Characterization, Processing and Devices1 Std.
Di13:45-14:30HCP E 47.1 »
S. Schön, W. Wegscheider


KurzbeschreibungThis course gives an introduction into the fundamentals of semiconductor materials. The main focus in this semester is on state-of-the-art characterization, semiconductor processing and devices.
LernzielBasic knowledge of semiconductor physics and technology. Application of this knowledge for state-of-the-art semiconductor device processing
Inhalt1. Material characterization: structural and chemical methods
1.1 X-ray diffraction methods (Powder diffraction, HRXRD, XRR, RSM)
1.2 Electron microscopy Methods (SEM, EDX, TEM, STEM, EELS)
2. Material characterization: electronic methods
2.1 van der Pauw techniquel2.2 Floating zone method
2.2 Hall effect
2.3 Cyclotron resonance spectroscopy
2.4. Quantum Hall effect
3. Material characterization: Optical methods
3.1 Absorption methods
3.2 Photoluminescence methods
3.3 FTIR, Raman spectroscopy
4. Semiconductor processing: lithography
4.1 Optical lithography methods
4.2 Electron beam lithography
4.3 FIB lithography
4.4 Scanning probe lithography
4.5 Direct growth methods (CEO, Nanowires)
5. Semiconductor processing: structuring of layers and devices
5.1 Wet etching methods
5.2 Dry etching methods (RIE, ICP, ion milling)
5.3 Physical vapor depositon methods (thermal, e-beam, sputtering)
5.4 Chemical vapor Deposition methods (PECVD, LPCVD, ALD)
5.5 Cleanroom basics & tour
6. Semiconductor devices
6.1 Semiconductor lasers
6.2 LED & detectors
6.3 Solar cells
6.4 Transistors (FET, HBT, HEMT)
Voraussetzungen / BesonderesThe "compulsory performance element" of this lecture is a short presentation of a research paper complementing the lecture topics. Several topics and corresponding papers will be offered on the moodle page of this lecture.


Information zur Leistungskontrolle (gültig bis die Lerneinheit neu gelesen wird)
Leistungskontrolle als Semesterkurs
ECTS Kreditpunkte6 KP
PrüfendeW. Wegscheider, S. Schön
RepetitionDie Leistungskontrolle wird in jeder Session angeboten. Die Repetition ist ohne erneute Belegung der Lerneinheit möglich.
Prüfungsmodusmündlich 20 Minuten
Zusatzinformation zum PrüfungsmodusEach student is required to give a short presentation on a selected topic during the exercises (compulsory continuous performance assessment). The topics focus on the research in the field covered by the lecture. Topics and preparation material will be provided during the lecture. The student’s presentation will be graded and must be passed on its own (pass/fail). Students who do not pass the assignment are required to de-register from the exam and will otherwise be treated as a no show.
Diese Angaben können noch zu Semesterbeginn aktualisiert werden; verbindlich sind die Angaben auf dem Prüfungsplan.


Moodle-KursMoodle-Kurs / Moodle course
Es werden nur die öffentlichen Lernmaterialien aufgeführt.


Keine Informationen zu Gruppen vorhanden.


Keine zusätzlichen Belegungseinschränkungen vorhanden.

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